基于视觉识别与激光传感集成的晶圆级自动双探测系统

2018 IEEE International Conference on Advanced Manufacturing (ICAM) Pub Date : 2018-11-01 DOI:10.1109/AMCON.2018.8614880

Ya-Ting Huang, Rongshun Chen

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引用次数: 0

摘要

本研究开发了一套以视觉和激光为传感元件的MEMS晶圆级自动化测试系统，可作为MEMS晶圆级测量的平台。该系统涉及人机界面和精确定位控制的开发，包括用于视觉识别的摄像头模块、用于自动定位的微动定位器、用于探针定位的激光传感器和用于晶圆定位的晶圆移动平台。

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Automated Dual-probing System for Wafer-level Testing Based on the Integration of Visual Identification and Laser Sensing

This study develops an automated wafer-level testing system, using visual and laser as the sensing devices, which can be the platform of MEMS measurement at wafer level. The proposed system involves the development of human-machine interface and precisely positioning control, which includes camera module for visual identification, motorized micro positioners, laser sensors for probe positioning automated, and wafer movable stage for the wafer positioning.

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2018 IEEE International Conference on Advanced Manufacturing (ICAM)

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