Michael F. Benisch, O. Fähnle, R. Rascher, W. Bogner
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Force and pressure analysis during overarm polishing
The Preston-equation implies, that, besides the relative speed υrel and a specific constant KP, the pressure p plays a significant role for the removal rate when polishing an optical component. This paper demonstrates a possibility for a qualitative evaluation of the pressure distribution before the polishing process. A pressure-sensitive foil is used as a gauge for pressure measurement. The effectiveness of this measuring method is explained. Specific weaknesses and limitations in the use of these foils are discussed. A method for an integrated evaluation of the pressure on different spots of the polishing pad is proposed at the end of the paper.
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