切克拉尔斯基晶体生长中播种和肩扛过程中的热输运

A. Saha, H. Zhang, V. Prasad
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引用次数: 0

摘要

研究了硅单晶在播种和肩扛过程中的Cz生长。在播种过程中,直径从一个很小的值增加到完全生长的晶体所需的值。考虑了熔体中的对流、晶体中的传导、熔体表面和晶体的辐射、熔体自由表面的表面张力和晶体的旋转等因素,研究了播散对热输运的影响。研究了旋转雷诺数、晶体辐射和马兰戈尼数对界面形状的影响。为了了解几何形状对传热速率的影响以及随后对界面形状的影响,我们选择了一些使用圆柱形晶体的情况进行了研究。控制方程采用曲线有限体积离散法求解,每次迭代后采用多区域自适应网格生成法重新分配网格。采用合适的能量和应力平衡方程来考虑自由表面的运动。结果表明,晶体的辐射和晶体的旋转都与界面形状有关。
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Thermal Transport During Seeding and Shouldering in the Czochralski Crystal Growth
Czochralski (Cz) growth during seeding and shouldering of silicon single crystal has been studied. During seeding, the diameter increases from a small value to the desired value of the fully-grown crystal. The convection in the melt, conduction in the crystal and radiation from the melt surface and crystal, surface tension at the free surface of the melt and crystal rotation have been considered to investigate the effect of seeding on thermal transport. The rotational Reynolds number, the radiation from the crystal and Marangoni number are varied to investigate their effect on the interface shape. A few selected cases have been studied using a cylindrical crystal to understand the effect of geometry on the heat transfer rate and subsequently on the interface shape. The governing equations are solved using the curvilinear finite volume discretization scheme and the grids are redistributed using the multizone adaptive grid generation after each iteration. The movement of free surface is taken care by employing suitable equations for energy and stress balance. Results show the dependency of both the radiation from the crystal and rotation of the crystal on the interface shape.
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