水平梯度冷冻法生长/spl β /-FeSi2块状晶体的电学性质

H. Shibata, Y. Makita, H. Kakemoto, Y. Tsai, S. Sakuragi, H. Katsumata, A. Obara, N. Kobayashi, S. Uekusa, T. Tsukamoto, T. Tsunoda, Y. Imai
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引用次数: 1

摘要

在不同的生长条件和退火条件下,采用水平梯度冻结法(HGF)制备了块状硅化铁。研究了原位退火和非原位退火两种退火工艺。制备并检测了三种类型的样品;(i)未采用任何退火工艺的样品,(ii)采用原位退火工艺的样品,以及(iii)既采用原位退火又采用非原位退火工艺的样品。考察和讨论了退火和生长条件对材料质量的影响,重点讨论了材料的结构性能和电学性能。x射线衍射结果表明,原位退火不足以使/spl α /+/spl epsi/共晶向包晶/spl β /-相转变。结果表明,原位退火后再进行离地退火,在900/spl℃的温度下进行200小时的离地退火就足以获得几乎单/spl的β /-相。在电学性能方面也证实了900/spl℃脱位退火300小时足以实现电半导体/spl β /-FeSi/sub 2/。在此条件下制备的样品具有p型电导率,空穴浓度和空穴迁移率分别约为5.68/spl倍/10/sup 17/ cm/sup -3/和1.36 cm/sup 2/Ns。
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Electrical properties of /spl beta/-FeSi2 bulk crystal grown by horizontal gradient freeze method
The growth of bulk iron silicide by Horizontal Gradient Freeze (HGF) method was achieved using different growth and annealing conditions. Two types of annealing process, in-situ annealing and ex-situ annealing, were examined. Three types of samples were prepared and examined; (i) samples which were not applied any annealing processes, (ii) samples which were applied in-situ annealing, and (iii) samples which were applied both in-situ and ex-situ annealing. The influence of annealing and growth conditions upon the material qualities was examined and discussed, putting special emphasis on the structural properties and electrical properties. Results of the X-ray diffraction revealed that only the in-situ annealing was not sufficient for the peritectic reaction from /spl alpha/+/spl epsi/ eutectic to peritectic /spl beta/-phase. However, it was revealed that, if the ex-situ annealing is applied after the in-situ annealing, the condition of 900/spl deg/C for 200 hours is enough for the ex-situ annealing to obtain almost single /spl beta/-phase. It was also confirmed in the aspect of electrical properties that ex-situ annealing at 900/spl deg/C for 300 hours is enough to realize electrically semiconducting /spl beta/-FeSi/sub 2/. The sample prepared under such a condition exhibited p-type conductivity with hole concentration and hole mobility about 5.68/spl times/10/sup 17/ cm/sup -3/ and 1.36 cm/sup 2/Ns, respectively.
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