A study on calibration compensation and perturbation of electromagnetic probes

The accuracy of electromagnetic probe coefficient is fundamental to the precision of near-field scanning value. In the traditional, the method to determine the coefficient by using microstrip line is based on the perfect near-field distribution provided by the line with the matching terminal. However, the actual calibration result error is a linear superposition of the loss of the microstrip trace and the perturbation introduced by the probe. Independently compensating the microstrip line loss is the key to calculate the accurate probe calibration coefficient. The probe perturbation exist simultaneously in both the calibration and testing process. The weight of the perturbation influence factor is the precondition of correcting the near-field scanning data and improving the performance of probe.