掺杂铂氧化锌电阻式气体传感器的氯感特性

M. Fiedot, P. Suchorska-Woźniak, O. Rac, W. Nawrot, H. Teterycz
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引用次数: 2

摘要

本文研究了一种以掺杂铂的氧化锌微棒为气敏层的电阻式氯气传感器。采用化学浴沉积法在硝酸锌(V)、六亚甲基四胺和氯铂酸的水溶液中生长活性层。利用扫描电子显微镜(SEM)和能量色散x射线能谱(EDX)对所得传感器的结构和形貌进行了表征。采用温度激发电导法(TSC)测定氯气传感性能。在测量期间,传感器在参考大气和含氯2、5或8 ppm的大气中进行了测试。结果表明,得到了掺杂铂的氧化锌微棒。TSC测量结果表明,所研制的传感器能够以非常好的灵敏度检测氯。
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Chlorine sensing properties of zinc oxide resistive gas sensor doped with platinum
In presented studies resistive chlorine gas sensor with gas sensitive layer in the form of zinc oxide microrods doped with platinum was developed. The growth of active layer was carried out in water solution containing zinc nitrate (V), hexamethylenetetramine and chloroplatinic acid using the chemical bath deposition method. The structure and morphology of obtained sensors was characterized by scanning electron microscope (SEM) and energy-dispersive X-ray spectroscopy (EDX). To determine the chlorine gas sensing properties Temperature-Stimulated Conductance method (TSC) was used. During the measurements sensor was tested in a reference atmosphere and an atmosphere with 2, 5 or 8 ppm of chlorine. Obtained results have shown that zinc oxide microrods doped with platinum were obtained. TSC measurements showed that developed sensor allows to detect chlorine with very good sensitivity.
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