{"title":"气溶胶辅助CVD法制备氮掺杂非晶碳的电学和光学性质分析","authors":"A. N. Fadzilah, K. Dayana, L. N. Ismail, M. Rusop","doi":"10.1109/RSM.2013.6706505","DOIUrl":null,"url":null,"abstract":"We have successfully deposit the a-C and nitrogen doped a-C (a-C:N) using the custom-made Aerosol-assisted CVD (AACVD). Natural precursor, camphor oil (C10H16O) was selected as the carbon source. The electrical and optical properties were characterized by BUKOH KEIKI CEP2000 solar simulator system and Perkin Elmer LAMBDA 750 UV-vis-NIR spectroscope respectively. Five samples were prepared for the a-C and a-C: N respectively, with the deposition temperatures ranging from 400°C to 600°C. An ohmic contact was acquired between the carbon/metal configurations from the current-voltage solar simulator system. Higher conductivity at a-C: N, ~x10-2 Scm-1 is due to the decrease in defects since the spin density gap decrease with the nitrogen addition. Pure a-C exhibit absorption coefficient, a of 10 cm-1, whereas for a-C:N, a is of 10 cm-1. The high σ value is at a-C:N is due to the presence of more graphitic component (sp2 carbon bonding) in the carbon films.","PeriodicalId":346255,"journal":{"name":"RSM 2013 IEEE Regional Symposium on Micro and Nanoelectronics","volume":"39 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Analysis on electrical and optical properties of nitrogen incorporated amorphous carbon prepared by aerosol-assisted CVD method\",\"authors\":\"A. N. Fadzilah, K. Dayana, L. N. Ismail, M. Rusop\",\"doi\":\"10.1109/RSM.2013.6706505\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We have successfully deposit the a-C and nitrogen doped a-C (a-C:N) using the custom-made Aerosol-assisted CVD (AACVD). Natural precursor, camphor oil (C10H16O) was selected as the carbon source. The electrical and optical properties were characterized by BUKOH KEIKI CEP2000 solar simulator system and Perkin Elmer LAMBDA 750 UV-vis-NIR spectroscope respectively. Five samples were prepared for the a-C and a-C: N respectively, with the deposition temperatures ranging from 400°C to 600°C. An ohmic contact was acquired between the carbon/metal configurations from the current-voltage solar simulator system. Higher conductivity at a-C: N, ~x10-2 Scm-1 is due to the decrease in defects since the spin density gap decrease with the nitrogen addition. Pure a-C exhibit absorption coefficient, a of 10 cm-1, whereas for a-C:N, a is of 10 cm-1. The high σ value is at a-C:N is due to the presence of more graphitic component (sp2 carbon bonding) in the carbon films.\",\"PeriodicalId\":346255,\"journal\":{\"name\":\"RSM 2013 IEEE Regional Symposium on Micro and Nanoelectronics\",\"volume\":\"39 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-09-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"RSM 2013 IEEE Regional Symposium on Micro and Nanoelectronics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/RSM.2013.6706505\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"RSM 2013 IEEE Regional Symposium on Micro and Nanoelectronics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/RSM.2013.6706505","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Analysis on electrical and optical properties of nitrogen incorporated amorphous carbon prepared by aerosol-assisted CVD method
We have successfully deposit the a-C and nitrogen doped a-C (a-C:N) using the custom-made Aerosol-assisted CVD (AACVD). Natural precursor, camphor oil (C10H16O) was selected as the carbon source. The electrical and optical properties were characterized by BUKOH KEIKI CEP2000 solar simulator system and Perkin Elmer LAMBDA 750 UV-vis-NIR spectroscope respectively. Five samples were prepared for the a-C and a-C: N respectively, with the deposition temperatures ranging from 400°C to 600°C. An ohmic contact was acquired between the carbon/metal configurations from the current-voltage solar simulator system. Higher conductivity at a-C: N, ~x10-2 Scm-1 is due to the decrease in defects since the spin density gap decrease with the nitrogen addition. Pure a-C exhibit absorption coefficient, a of 10 cm-1, whereas for a-C:N, a is of 10 cm-1. The high σ value is at a-C:N is due to the presence of more graphitic component (sp2 carbon bonding) in the carbon films.