基于集成电路兼容的微加工热平台与纳米结构多孔膜融合的超高性能气体传感器

2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Pub Date : 2013-06-16 DOI:10.1109/TRANSDUCERS.2013.6627205

Lei Xu, Zhengfei Dai, Tie Li, G. Duan, W. Cai, Yuelin Wang

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引用次数: 1

摘要

采用微热平台(MHP)和单层有序多孔SnO2纳米膜融合的新型微纳气体传感器，实现了低功耗、高灵敏度和快速响应的超高性能。基于基于铂微加热器和数字间电极(IDE)的MHP，采用聚苯乙烯球单层胶体晶体模板原位合成了高度有序的SnO2多孔膜。测试结果表明，该传感器对100 ppb乙醇敏感，灵敏度为1.6 (Rair/Rgas)，功耗为25 mW，响应时间小于2 s。传感器的检出限计算为9 ppb。

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Ultra high performance gas sensor based on IC compatible fusion of micromachined hotplatform and nanostructured porous film

Ultra-high performances of low power, high sensitivity, and fast response was achieved in a novel micro/nano gas sensor that fused a microhotplatform (MHP) and a monolayer of ordered porous SnO2 nanofilm. Based on the MHP with a platinum microheater and interdigital electrode (IDE), a highly ordered SnO2 porous film was in-situ synthesized using a polystyrene sphere monolayer colloidal crystal template. Test results indicated that the sensor was sensitive to 100 ppb ethanol with a sensitivity of 1.6 (Rair/Rgas), a power consumption of 25 mW and a response time less than 2 s. The detection limit of the sensor was calculated as 9 ppb.

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2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)

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