FCBGA微碰撞结构的应力评估

W. Y. Huang, E. Chen, J. Lai, Yu Po Wang
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引用次数: 0

摘要

系统级封装(SiP)技术包括多芯片模块(MCM)、多芯片封装(MCP)、堆叠芯片、封装上封装(PoP)、封装中封装(PiP)和嵌入式基板技术。而目前SIP互连通常采用Au线键合技术,以Staked Die结构为例,随着堆叠模数的增加,上模需要更长的线键合长度来进行信号互连,导致整个系统的电气性能下降。此外,线键合技术作为堆叠模解决方案,需要在功能芯片之间插入间隔模以增加键合空间,从而增加封装的总厚度。为了获得更好的电性能和减小外形尺寸,开发了一种新的“Micro bump”结构的细间距凸点技术,在顶部和底部芯片上都采用金属凸点。微凸点结构是槽式硅孔(TSV)的关键技术之一,用于芯片间互连,其尺寸小于典型的倒装芯片凸点。本研究采用15mm×15mm面对面叠层薄细间距BGA (F2F-STFBGA)封装进行有限元分析。对不同微碰撞结构的低k应力、碰撞应力和衬垫剥离应力进行了评价。首先研究了芯片与芯片和芯片与衬底的两种不同的面对面互连水平(EHS-FCBGA)。其次比较了普通凸点结构(焊料凸点)的四种不同互连凸点结构,即上下凸点均采用铜柱、上下凸点均采用铜柱、下凸点采用金柱、上凸点采用金柱、下凸点采用铜柱。综上所述,提出了考虑Micro Bump结构、材料和封装几何的F2F-S2TFBGA封装设计准则。
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Stress evaluations in Micro Bump structures of FCBGA
System in Package(SiP) includes technologies of Multi-chip Module(MCM), Multi-chip Package(MCP), stacked die, Package on Package(PoP), Package in Package(PiP) and Embedded substrate. While Au wire bonding technology is commonly used as current SIP interconnection solution, take Staked Die structure for example, with increasing stack die number upper die needs longer wire bonding length for signal interconnection and results in lower electrical performance for whole system. In addition, wire bonding technology as Stacked die solution requires spacer die insertion between functional chips for bonding space and thus increases total package thickness. In order to achieve better electrical performance and reduce form factor, a new fine pitch bump technology of “Micro Bump” structure is developed with metal bump for both top and bottom chips. Micro bump structure is one of the key technologies of Trough Silicon Vias (TSV) and is used in chip to chip interconnection with the dimension of Micro bump smaller than typical flip chip bump. In this study a 15mm×15mm Face-to-Face Stacked-die Thin and Fine-pitch BGA (F2F-STFBGA) package was adopted for Finite Element Method (FEM) analysis. The evaluations focused on low-k stress, bump stress and pad peeling stress of different Micro Bump structures. Firstly two different face to face interconnection levels of chip to chip and chip to substrate (EHS-FCBGA) were investigated. Secondly four different interconnection bump structures of common bump structure (solder bump), Cu pillar for both top and bottom bump, Cu pillar for both top bump and Au for bottom bump, Au for top bump and Cu pillar for bottom bump were compared. In conclusion a design guideline of F2F-S2TFBGA package was recommended with considerations of Micro Bump structure, material, and package geometry.
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