Rongmin Zhao, Fangfang Liu, Zihan Yang, Fanghui Lin
{"title":"基于光纤光栅的纳米尺度位移测量方法","authors":"Rongmin Zhao, Fangfang Liu, Zihan Yang, Fanghui Lin","doi":"10.1109/ICAICA50127.2020.9182392","DOIUrl":null,"url":null,"abstract":"The continuous development of nanoscience and nanotechnology engages more and more attention to micro-scale or nano-scale measurement technology. This paper studied a high-sensitivity displacement measurement method based on fiber Bragg grating (FBG), analyzed its measurement principle and system composition, and simulated signals of the high-resolution wavelength demodulation system of FBG. The sensitivity of the nano-scale measurement machine grows significantly owing to the design of an improved high-resolution wavelength demodulating method. Finally, the experimental error sources were analyzed. The final performance experiments and results of the measurement system indicate the machine sensitivity reaches 6.22 mV/nm, and resolution is about 3.3 nm.","PeriodicalId":113564,"journal":{"name":"2020 IEEE International Conference on Artificial Intelligence and Computer Applications (ICAICA)","volume":"19 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Method for Nano-scale Displacement Measurement Based on Fiber Bragg Grating\",\"authors\":\"Rongmin Zhao, Fangfang Liu, Zihan Yang, Fanghui Lin\",\"doi\":\"10.1109/ICAICA50127.2020.9182392\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The continuous development of nanoscience and nanotechnology engages more and more attention to micro-scale or nano-scale measurement technology. This paper studied a high-sensitivity displacement measurement method based on fiber Bragg grating (FBG), analyzed its measurement principle and system composition, and simulated signals of the high-resolution wavelength demodulation system of FBG. The sensitivity of the nano-scale measurement machine grows significantly owing to the design of an improved high-resolution wavelength demodulating method. Finally, the experimental error sources were analyzed. The final performance experiments and results of the measurement system indicate the machine sensitivity reaches 6.22 mV/nm, and resolution is about 3.3 nm.\",\"PeriodicalId\":113564,\"journal\":{\"name\":\"2020 IEEE International Conference on Artificial Intelligence and Computer Applications (ICAICA)\",\"volume\":\"19 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-06-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2020 IEEE International Conference on Artificial Intelligence and Computer Applications (ICAICA)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICAICA50127.2020.9182392\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 IEEE International Conference on Artificial Intelligence and Computer Applications (ICAICA)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICAICA50127.2020.9182392","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Method for Nano-scale Displacement Measurement Based on Fiber Bragg Grating
The continuous development of nanoscience and nanotechnology engages more and more attention to micro-scale or nano-scale measurement technology. This paper studied a high-sensitivity displacement measurement method based on fiber Bragg grating (FBG), analyzed its measurement principle and system composition, and simulated signals of the high-resolution wavelength demodulation system of FBG. The sensitivity of the nano-scale measurement machine grows significantly owing to the design of an improved high-resolution wavelength demodulating method. Finally, the experimental error sources were analyzed. The final performance experiments and results of the measurement system indicate the machine sensitivity reaches 6.22 mV/nm, and resolution is about 3.3 nm.