用于CO2激光传输的GeO2玻璃中空波导的液相沉积

C. Jing, J. Chu, P. H. Hopchev, Wei Sun, Yi Li
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引用次数: 0

摘要

CO2激光器(波长10.6 μm)在激光手术、材料加工、红外传感器和成像等领域有着重要的应用。CO2激光光波导在这些应用中占据了中心地位。玻璃拉伸技术和溶胶-凝胶法制备了GeO2和锗基玻璃空心波导。本文采用液相沉积(LPD)法制备了GeO2玻璃空心波导样品。研究了样品的形貌、结构和光传输性能。结果表明,通过LPD工艺可以在石英玻璃毛细管内壁形成GeO2玻璃反射层。GeO2玻璃层与衬底硅玻璃管构成衰减全反射(ATR)中空波导结构。通过损耗谱分析,发现样品有一个以10.6 μm为中心的nr< 1波段。样品显示,当输出~ 35w CO2激光束(TEM00)时,平均损耗为1.13 dB/m。
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Liquid Phase Deposition of GeO2 Glass Hollow Waveguide for Delivery of CO2 Laser Radiation
CO2 laser (wavelength 10.6 μm) has important applications in laser surgery, material processing, infrared sensors and imaging. CO2 laser optical waveguides are gaining a central position in these applications. Glass-drawing technique and sol-gel methods have been used to prepare GeO2 and germania-based glass hollow waveguides. In this work, a GeO2 glass hollow waveguide sample was fabricated by using a liquid phase deposition (LPD) approach. The morphology, structure and optical transmission properties of the sample were studied. The results indicate that a GeO2 glass reflective layer could be formed on the inner wall of a silica glass capillary tube via the LPD process. The GeO2 glass layer and the substrate silica glass tube constitute an attenuated total reflectance (ATR) hollow waveguide structure. An nr<;1 band centering at around 10.6 μm is observed by loss spectrum analysis of the sample. The sample shows a mean loss of 1.13 dB/m for delivery of a ~35 W CO2 laser beam (TEM00).
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