超薄SiO2层在金属-绝缘体-半导体(MIS)光电化学器件中的作用

D. Esposito
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引用次数: 0

摘要

基于金属-绝缘体-半导体(MIS)结构的固态结对于许多光电应用(如光伏、光电化学电池和光电检测)具有很大的兴趣。与密切相关的金属-半导体结或肖特基结相比,MIS结的一个主要优点是,将金属和半导体分开的薄绝缘层(1-3纳米厚)可以显着降低不希望的界面中隙状态的密度。中隙状态的减少有助于“解脚”结,从而实现显着更高的内置电压。MIS结的第二个主要优点是薄绝缘层还可以保护底层半导体免受电化学环境中的腐蚀,使MIS架构非常适合(照片)电化学应用。在本报告中,研究了浸在电解质中的不连续硅基MIS结,用于i.)光电化学电池(PECs)中太阳能-水分解的光电极和ii.)位置敏感光电探测器。用于这两种应用的MIS光电极的开发和优化在很大程度上依赖于了解薄SiO2层的处理如何影响纳米和微尺度MIS结的性能,以及绝缘层与电解质的相互作用。在这项工作中,我们系统地探讨了绝缘体厚度、合成方法和化学处理对这些MIS器件光电电化学和电化学性能的影响。结果表明,电解质诱导反转在决定两种应用中MIS光电极内的载流子动力学方面起着关键作用。
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The role of ultra-thin SiO2 layers in metal-insulator-semiconductor (MIS) photoelectrochemical devices (Presentation Recording)
Solid-state junctions based on a metal-insulator-semiconductor (MIS) architecture are of great interest for a number of optoelectronic applications such as photovoltaics, photoelectrochemical cells, and photodetection. One major advantage of the MIS junction compared to the closely related metal-semiconductor junction, or Schottky junction, is that the thin insulating layer (1-3 nm thick) that separates the metal and semiconductor can significantly reduce the density of undesirable interfacial mid-gap states. The reduction in mid-gap states helps “un-pin” the junction, allowing for significantly higher built-in-voltages to be achieved. A second major advantage of the MIS junction is that the thin insulating layer can also protect the underlying semiconductor from corrosion in an electrochemical environment, making the MIS architecture well-suited for application in (photo)electrochemical applications. In this presentation, discontinuous Si-based MIS junctions immersed in electrolyte are explored for use as i.) photoelectrodes for solar-water splitting in photoelectrochemical cells (PECs) and ii.) position-sensitive photodetectors. The development and optimization of MIS photoelectrodes for both of these applications relies heavily on understanding how processing of the thin SiO2 layer impacts the properties of nano- and micro-scale MIS junctions, as well as the interactions of the insulating layer with the electrolyte. In this work, we systematically explore the effects of insulator thickness, synthesis method, and chemical treatment on the photoelectrochemical and electrochemical properties of these MIS devices. It is shown that electrolyte-induced inversion plays a critical role in determining the charge carrier dynamics within the MIS photoelectrodes for both applications.
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