基于选择性面积MOCVD的应变层InGaAs-GaAs-AIGaAs埋置异质结构非吸收镜激光器

R. Lammert, G. M. Smith, D. Forbes, M. Osowski, J. Coleman
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引用次数: 14

摘要

半导体激光器在高功率工作时,近切面有源区的光吸收可能导致灾难性光损伤(COD)。报道了几种提高COD受限光功率的方案。一种方案需要在切面附近形成非注入区域,以减少切面处的非辐射复合[1],[2]。该方案的缺点是非注入区充当饱和吸收器,可能影响阈值附近的L-I曲线。另一种增加COD发生时输出功率的方案涉及在激光切面处形成一个具有比发射激光能量更高的带隙能量的区域。制造这些非吸收镜(NAMs)的一种方法是利用非平面衬底制造的弯曲波导[3],[4]。虽然这种方法产生的NAMs具有宽的近场,但由于光束在窗口区自由衍射,窗口区与发光区之间的光场耦合度较低。此外,为了获得所需的相对较短的窗口区域(<15µm),精确的切割是必要的。另一种产生纳米粒子的方法是使用蚀刻和再生技术,但这种方法也允许光束在窗口区域自由衍射,并且再次需要精确的切割[5]。
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Strained-Layer InGaAs-GaAs-AIGaAs Buried-Heterostructure Lasers with Nonabsorbing Mirrors by Selective-Area MOCVD
Optical absorption in the active region near the facets of semiconductor lasers during high-power operation may result in catastrophic optical damage (COD). Several schemes to increase the COD limited optical power have been reported. One scheme entails forming non-injection regions near the facets to reduce the nonradiative recombination at the facets [1], [2]. A disadvantage of this scheme is that the non-injection region acts as a saturable absorber which may effect the L-I curve near threshold. Another scheme to increase the output power at which COD occurs involves forming a region at the laser facets which has a higher band gap energy than the energy of the emitted laser light. One method to produce these nonabsorbing mirrors (NAMs) utilizes bent-waveguides fabricated using nonplanar substrates [3], [4]. Although this method produces NAMs with broad near-fields, the coupling of the optical field between the window region and the light-emitting region is low due to the optical beam diffracting freely in the window region. In addition, accurate cleaving is necessary to achieve the relatively short window regions needed (<15 µm). Another method to produce NAMs uses an etch and regrowth technique, but this method also allows the optical beam to diffract freely in the window region and accurate cleaving is again needed [5].
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Wavelength Uniformity in λ/4-Shifted DFB Laser Array WDM Transmitters Strained-Layer InGaAs-GaAs-AIGaAs Buried-Heterostructure Lasers with Nonabsorbing Mirrors by Selective-Area MOCVD Influence of small radiation doses on the parameters of injection lasers Non-imaging Laser Diode Array Beam Shaper A Correct Way to Model Arbitrary Complex Distributed FeedBack (DFB) Lasers in The Above Threshold Regime
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