基于mems的Wolter i型x射线光学器件的组装

2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI:10.1109/OMEMS.2012.6318814

T. Kakiuchi, Y. Ezoe, T. Moriyama, I. Mitsuishi, T. Ogawa, K. Mitsuda, K. Morishita, K. Nakajima

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引用次数: 0

摘要

描述了一种适用于未来行星探测任务的基于mems的Wolter i型光学器件的实现。设计的对准系统允许独立调整x射线反射镜的位置和角度设置。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Assembly of a MEMS-based Wolter type-I x-ray optic

Implementation of a MEMS-based Wolter type-I optic that is suitable for future planetary exploration missions is described. A devised alignment system permits independent adjustment of position and angular settings of x-ray mirrors.

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2012 International Conference on Optical MEMS and Nanophotonics

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