{"title":"用于集成传感器的新型温度/湿度敏感多层厚膜结构","authors":"H. Klym, I. Hadzaman, O. Shpotyuk","doi":"10.1109/LFNM.2010.5624217","DOIUrl":null,"url":null,"abstract":"Temperature and humidity-sensitive thick-film structures based on spinel semiconducting ceramics different chemical composition (Cu<inf>0.1</inf>Ni<inf>0.1</inf>Co<inf>1.6</inf>Mn<inf>1.2</inf>O<inf>4</inf> and Cu<inf>0.1</inf>Ni<inf>0.8</inf>Co<inf>0.2</inf>Mn<inf>1.9</inf>O<inf>4</inf>) and dielectric magnesium aluminate MgAl<inf>2</inf>O<inf>4</inf> ceramics were fabricated and studied. These elements are shown to be successfully applied for integrated temperature/humidity sensors of environmental monitoring and control.","PeriodicalId":117420,"journal":{"name":"2010 10th International Conference on Laser and Fiber-Optical Networks Modeling","volume":"15 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-11-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Novel temperature/humidity-sensitive multilayer thick-film structures for integrated sensors application\",\"authors\":\"H. Klym, I. Hadzaman, O. Shpotyuk\",\"doi\":\"10.1109/LFNM.2010.5624217\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Temperature and humidity-sensitive thick-film structures based on spinel semiconducting ceramics different chemical composition (Cu<inf>0.1</inf>Ni<inf>0.1</inf>Co<inf>1.6</inf>Mn<inf>1.2</inf>O<inf>4</inf> and Cu<inf>0.1</inf>Ni<inf>0.8</inf>Co<inf>0.2</inf>Mn<inf>1.9</inf>O<inf>4</inf>) and dielectric magnesium aluminate MgAl<inf>2</inf>O<inf>4</inf> ceramics were fabricated and studied. These elements are shown to be successfully applied for integrated temperature/humidity sensors of environmental monitoring and control.\",\"PeriodicalId\":117420,\"journal\":{\"name\":\"2010 10th International Conference on Laser and Fiber-Optical Networks Modeling\",\"volume\":\"15 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2010-11-09\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2010 10th International Conference on Laser and Fiber-Optical Networks Modeling\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/LFNM.2010.5624217\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 10th International Conference on Laser and Fiber-Optical Networks Modeling","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/LFNM.2010.5624217","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Novel temperature/humidity-sensitive multilayer thick-film structures for integrated sensors application
Temperature and humidity-sensitive thick-film structures based on spinel semiconducting ceramics different chemical composition (Cu0.1Ni0.1Co1.6Mn1.2O4 and Cu0.1Ni0.8Co0.2Mn1.9O4) and dielectric magnesium aluminate MgAl2O4 ceramics were fabricated and studied. These elements are shown to be successfully applied for integrated temperature/humidity sensors of environmental monitoring and control.
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