中性溶液中硅烷偶联处理提高Co的耐蚀性

K. Mabuchi
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摘要

许多利用纳米级金属薄膜的磁性、力学和化学性能的产品正在许多领域得到开发。建立纳米级或原子级防腐蚀技术是控制腐蚀而不失去这些产品特性的必要条件。本研究从提高钴薄膜耐蚀性的角度对BTSE、BTSPA和BTSPS表面处理进行了评价。用Tafel图评价腐蚀电流密度的腐蚀行为。用XPS对处理后的钴膜进行了表征,并用SEM和AFM对处理后的钴膜进行了观察。这些处理的结果是在钴上形成硅烷偶联层。然而,不同层提供的耐腐蚀性差异很大。用双氧水浸泡BTSE一小时没有改善,而浸泡24小时则有很大改善。相比之下,在BTSPA中与双氧水浸泡24小时不会导致腐蚀改善,而浸泡1小时则具有耐腐蚀性。用双氧水浸泡在BTSPS中两种时间都没有改善,因为沉积在钴上的一致性很差。这些行为可以用软硬酸碱原理来解释。
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Improving Corrosion Resistance of Co Using Silane Coupling Treatment in Neutral Solution
Many products using a magnetic property, a mechanical property and chemical property of the thin metal film of the nm order are developing in the great many fields. The establishment of technology for corrosion prevention under nm level or the atom level is necessary to control corrosion without losing the characteristic of these products. In this study, surface treatments using BTSE, BTSPA, and BTSPS were evaluated from the viewpoint of improving the corrosion resistance of thin cobalt films. Corrosion behavior was evaluated corrosion current density using Tafel plots. Treated cobalt films were characterized by XPS and observed by SEM and AFM. A silane-coupling layer formed on the cobalt as a result of each of these treatments. However, the corrosion resistances offered by the different layers varied significantly. Immersion in BTSE with hydrogen peroxide for one hour did not yield an improvement, whereas immersion for 24 hours resulted in a large improvement. In contrast, immersion in BTSPA with hydrogen peroxide for 24 hours did not lead to a corrosion improvement, whereas immersion for one hour provided corrosion resistance. Immersion in BTSPS with hydrogen peroxide for either amount of time yielded no improvement, because of the poor coherency of the deposit on cobalt. These behaviors can be explained in terms of the hard and soft acid-base principle.
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