用于模型验证和过程监控的NPN CML环形振荡器

Proceedings of the 2015 International Conference on Microelectronic Test Structures Pub Date : 2015-03-23 DOI:10.1109/ICMTS.2015.7106118

Cory Compton

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引用次数: 1

摘要

在0.18um SiGe BiCMOS工艺中设计了一组NPN CML(电流模式逻辑)振荡器，旨在提供模型验证和过程监控功能。主要的设计目标是，振荡器需要小而易于测试，以便其中许多振荡器可以放置在划线线上，并由生产PCM测试设备进行测量。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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NPN CML ring oscillators for model verification and process monitoring

A set of NPN CML (Current Mode Logic) oscillators is designed in a 0.18um SiGe BiCMOS process, with the intention to provide model verification and process monitoring capabilities. The main design goals are that the oscillators need to be small and easy to test such that many of them can be placed in the scribe line and be measured by production PCM test equipment.

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Proceedings of the 2015 International Conference on Microelectronic Test Structures

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