Cheng-Hung Lin, Cheng-Yen Chen, Dong-Ming Yeh, C.C. Yang
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Photonic crystal light-emitting diode fabricated with photoelectrochemical wet etching and phase mask interference
We demonstrate the high light-extraction efficiency by using the photoelectrochemical etching technique for forming photonic crystal structures on an InGaN/GaN quantum-well light-emitting diode through phase-mask interference. More than 90% increase of output power is observed.