{"title":"金属化对熔融二氧化硅双壳陀螺仪的影响","authors":"Danmeng Wang, Wei Guan, M. Asadian, A. Shkel","doi":"10.1109/INERTIAL53425.2022.9787525","DOIUrl":null,"url":null,"abstract":"This paper reports the effect of metallization on performance of Fused Silica (FS) Micro-machined Hemispherical Resonator Gyroscopes (micro-HRGs). For capacitive detection of motion, a conductive coating of the sensing element is required, which results in a reduction of the mechanical quality factors as well as an introduction of the electrical resistance. We experimentally demonstrated the impact of metal coating on both the quality factor and the electrical resistance using a developed in-house FS Dual-Shell Gyroscope (DSG), a version of micro-HRG. We derived an electromechanical model, analytically predicted behavior, and experimentally confirmed the effect of electrical resistance on the motion detection sensitivity and the overall noise performance of the DSG. For the device under test, we identified an optimal thickness of Cr coating to achieve a low resistance for optimal noise performance with a minimal loss of the quality factor.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"11 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Effect of Metallization on Fused Silica Dual-Shell Gyroscopes\",\"authors\":\"Danmeng Wang, Wei Guan, M. Asadian, A. Shkel\",\"doi\":\"10.1109/INERTIAL53425.2022.9787525\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper reports the effect of metallization on performance of Fused Silica (FS) Micro-machined Hemispherical Resonator Gyroscopes (micro-HRGs). For capacitive detection of motion, a conductive coating of the sensing element is required, which results in a reduction of the mechanical quality factors as well as an introduction of the electrical resistance. We experimentally demonstrated the impact of metal coating on both the quality factor and the electrical resistance using a developed in-house FS Dual-Shell Gyroscope (DSG), a version of micro-HRG. We derived an electromechanical model, analytically predicted behavior, and experimentally confirmed the effect of electrical resistance on the motion detection sensitivity and the overall noise performance of the DSG. For the device under test, we identified an optimal thickness of Cr coating to achieve a low resistance for optimal noise performance with a minimal loss of the quality factor.\",\"PeriodicalId\":435781,\"journal\":{\"name\":\"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)\",\"volume\":\"11 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-05-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/INERTIAL53425.2022.9787525\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/INERTIAL53425.2022.9787525","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Effect of Metallization on Fused Silica Dual-Shell Gyroscopes
This paper reports the effect of metallization on performance of Fused Silica (FS) Micro-machined Hemispherical Resonator Gyroscopes (micro-HRGs). For capacitive detection of motion, a conductive coating of the sensing element is required, which results in a reduction of the mechanical quality factors as well as an introduction of the electrical resistance. We experimentally demonstrated the impact of metal coating on both the quality factor and the electrical resistance using a developed in-house FS Dual-Shell Gyroscope (DSG), a version of micro-HRG. We derived an electromechanical model, analytically predicted behavior, and experimentally confirmed the effect of electrical resistance on the motion detection sensitivity and the overall noise performance of the DSG. For the device under test, we identified an optimal thickness of Cr coating to achieve a low resistance for optimal noise performance with a minimal loss of the quality factor.