金属化对熔融二氧化硅双壳陀螺仪的影响

Danmeng Wang, Wei Guan, M. Asadian, A. Shkel
{"title":"金属化对熔融二氧化硅双壳陀螺仪的影响","authors":"Danmeng Wang, Wei Guan, M. Asadian, A. Shkel","doi":"10.1109/INERTIAL53425.2022.9787525","DOIUrl":null,"url":null,"abstract":"This paper reports the effect of metallization on performance of Fused Silica (FS) Micro-machined Hemispherical Resonator Gyroscopes (micro-HRGs). For capacitive detection of motion, a conductive coating of the sensing element is required, which results in a reduction of the mechanical quality factors as well as an introduction of the electrical resistance. We experimentally demonstrated the impact of metal coating on both the quality factor and the electrical resistance using a developed in-house FS Dual-Shell Gyroscope (DSG), a version of micro-HRG. We derived an electromechanical model, analytically predicted behavior, and experimentally confirmed the effect of electrical resistance on the motion detection sensitivity and the overall noise performance of the DSG. For the device under test, we identified an optimal thickness of Cr coating to achieve a low resistance for optimal noise performance with a minimal loss of the quality factor.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"11 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Effect of Metallization on Fused Silica Dual-Shell Gyroscopes\",\"authors\":\"Danmeng Wang, Wei Guan, M. Asadian, A. Shkel\",\"doi\":\"10.1109/INERTIAL53425.2022.9787525\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper reports the effect of metallization on performance of Fused Silica (FS) Micro-machined Hemispherical Resonator Gyroscopes (micro-HRGs). For capacitive detection of motion, a conductive coating of the sensing element is required, which results in a reduction of the mechanical quality factors as well as an introduction of the electrical resistance. We experimentally demonstrated the impact of metal coating on both the quality factor and the electrical resistance using a developed in-house FS Dual-Shell Gyroscope (DSG), a version of micro-HRG. We derived an electromechanical model, analytically predicted behavior, and experimentally confirmed the effect of electrical resistance on the motion detection sensitivity and the overall noise performance of the DSG. For the device under test, we identified an optimal thickness of Cr coating to achieve a low resistance for optimal noise performance with a minimal loss of the quality factor.\",\"PeriodicalId\":435781,\"journal\":{\"name\":\"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)\",\"volume\":\"11 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-05-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/INERTIAL53425.2022.9787525\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/INERTIAL53425.2022.9787525","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3

摘要

本文报道了金属化对熔融二氧化硅(FS)微机械半球谐振陀螺仪(micro-HRGs)性能的影响。对于运动的电容性检测,需要在传感元件上涂一层导电涂层,这将导致机械质量因素的减少以及电阻的引入。我们通过实验证明了金属涂层对质量因子和电阻的影响,使用了FS内部开发的双壳陀螺仪(DSG),一种微型hrg。我们推导了一个机电模型,分析预测了行为,并通过实验证实了电阻对DSG运动检测灵敏度和整体噪声性能的影响。对于正在测试的器件,我们确定了Cr涂层的最佳厚度,以实现低电阻的最佳噪声性能,并以最小的质量因数损失。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
Effect of Metallization on Fused Silica Dual-Shell Gyroscopes
This paper reports the effect of metallization on performance of Fused Silica (FS) Micro-machined Hemispherical Resonator Gyroscopes (micro-HRGs). For capacitive detection of motion, a conductive coating of the sensing element is required, which results in a reduction of the mechanical quality factors as well as an introduction of the electrical resistance. We experimentally demonstrated the impact of metal coating on both the quality factor and the electrical resistance using a developed in-house FS Dual-Shell Gyroscope (DSG), a version of micro-HRG. We derived an electromechanical model, analytically predicted behavior, and experimentally confirmed the effect of electrical resistance on the motion detection sensitivity and the overall noise performance of the DSG. For the device under test, we identified an optimal thickness of Cr coating to achieve a low resistance for optimal noise performance with a minimal loss of the quality factor.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
Glass Molding for Microstructures Miniaturized Navigation Grade Quartz Vba Accelerometer For Space Applications 0.25 deg/h Closed-Loop Bulk Acoustic Wave Gyroscope Temperature Drift Self-calibration for Honeycomb-like Disk Resonator Gyroscope Wobble Estimation of a Turntable axis by using an Inertial Measurement Unit
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1