在可制造的180 GHz AlInAs/InGaAs HBT IC技术上实现的低功耗52.9 GHz静态分频器

M. Sokolich, D. Docter, Y. Brown, A. Kramer, J. Jensen, W. Stanchina, S. Thomas, C. Fields, D. A. Ahmari, M. Lui, R. Martinez, J. Duvall
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引用次数: 35

摘要

我们在AlInAs/InGaAs HBT技术中展示了52.9 GHz静态1/8分频器。据我们所知,这是任何半导体技术中最快的静态分频器。在高成品率的光学光刻三台面HBT工艺中实现了分频器。在最大速度下,功耗为40兆瓦/触发器。第二个1/8分频器,设计用于更低的功率,但使用相同尺寸的晶体管,在35 GHz时消耗8.6 mW/触发器。高速版本的灵敏度非常出色,工作范围从直流到48 GHz,输入功率小于0 dBm。均匀性和重复性也得到了证明;所有功能分频器都在45 GHz以上的晶圆上工作,外推的分频器良率表明该工艺能够支持500-1000个晶体管设计。电路性能对器件外延结构的细节相对不敏感,表明其具有高度鲁棒性和可制造性。
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A low power 52.9 GHz static divider implemented in a manufacturable 180 GHz AlInAs/InGaAs HBT IC technology
We have demonstrated a 52.9 GHz static 1/8 divider in an AlInAs/InGaAs HBT technology. To our knowledge this is the fastest static divider reported in any semiconductor technology. The divider was realized in a high yield optical lithography triple mesa HBT process. At maximum speed, power consumption was 40 mW/flip-flop. A second 1/8 divider, designed for lower power but using the same size transistors, consumed 8.6 mW/flip-flop at 35 GHz. Sensitivity was excellent with the high-speed version operating from DC to 48 GHz with less than 0 dBm input power. Uniformity and reproducibility were also demonstrated; all functional dividers operated above 45 GHz on-wafer and the extrapolated yield of dividers indicates that the process is capable of supporting 500-1000 transistor designs. Circuit performance was relatively insensitive to the details of the device epitaxial structure indicating a highly robust and manufacturable process.
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