{"title":"铂上多壁碳纳米管的生长","authors":"Z. Yunusa, M. Hamidon, S. Rashid","doi":"10.1109/RSM.2013.6706551","DOIUrl":null,"url":null,"abstract":"In this paper, Multi-Walled Carbon Nanotubes were grown on a surface of a substrate that consists of a quartz piezoelectric substrate with titanium under layer and platinum electrodes. The Carbon Nanotubes (CNT) was grown using thermal CVD with Iron Nitrate as the catalyst. The growth of the carbon nanotubes was carried out at a temperature of 8000C with hydrogen as the process gas and benzene as the hydrocarbon. Characterization of the as grown CNT was done using Scanning Electron Microscope (SEM) and Raman Spectroscopy. The Raman spectroscopy was carried out on a selected area of 100micron by 100 micron and the peaks of the D-band, G-band and the second order modes were observed from the Raman spectra. Image j image processing software was also used for the extraction of the diameter of the nanotube in which the average diameter was computed to be 46nm.","PeriodicalId":346255,"journal":{"name":"RSM 2013 IEEE Regional Symposium on Micro and Nanoelectronics","volume":"16 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Growth of Multi-Walled Carbon Nanotubes on platinum\",\"authors\":\"Z. Yunusa, M. Hamidon, S. Rashid\",\"doi\":\"10.1109/RSM.2013.6706551\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, Multi-Walled Carbon Nanotubes were grown on a surface of a substrate that consists of a quartz piezoelectric substrate with titanium under layer and platinum electrodes. The Carbon Nanotubes (CNT) was grown using thermal CVD with Iron Nitrate as the catalyst. The growth of the carbon nanotubes was carried out at a temperature of 8000C with hydrogen as the process gas and benzene as the hydrocarbon. Characterization of the as grown CNT was done using Scanning Electron Microscope (SEM) and Raman Spectroscopy. The Raman spectroscopy was carried out on a selected area of 100micron by 100 micron and the peaks of the D-band, G-band and the second order modes were observed from the Raman spectra. Image j image processing software was also used for the extraction of the diameter of the nanotube in which the average diameter was computed to be 46nm.\",\"PeriodicalId\":346255,\"journal\":{\"name\":\"RSM 2013 IEEE Regional Symposium on Micro and Nanoelectronics\",\"volume\":\"16 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-09-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"RSM 2013 IEEE Regional Symposium on Micro and Nanoelectronics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/RSM.2013.6706551\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"RSM 2013 IEEE Regional Symposium on Micro and Nanoelectronics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/RSM.2013.6706551","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
摘要
在本文中,多壁碳纳米管生长在由石英压电衬底、钛衬底和铂电极组成的衬底表面。以硝酸铁为催化剂,采用热气相沉积法制备了碳纳米管(CNT)。在8000C的温度下,以氢为工艺气体,苯为碳氢化合物,进行了碳纳米管的生长。利用扫描电镜(SEM)和拉曼光谱对生长的碳纳米管进行了表征。选取100 μ m × 100 μ m的区域进行拉曼光谱分析,观察到d波段、g波段和二阶模式的拉曼光谱峰。同时利用图像处理软件对纳米管直径进行提取,计算出纳米管的平均直径为46nm。
Growth of Multi-Walled Carbon Nanotubes on platinum
In this paper, Multi-Walled Carbon Nanotubes were grown on a surface of a substrate that consists of a quartz piezoelectric substrate with titanium under layer and platinum electrodes. The Carbon Nanotubes (CNT) was grown using thermal CVD with Iron Nitrate as the catalyst. The growth of the carbon nanotubes was carried out at a temperature of 8000C with hydrogen as the process gas and benzene as the hydrocarbon. Characterization of the as grown CNT was done using Scanning Electron Microscope (SEM) and Raman Spectroscopy. The Raman spectroscopy was carried out on a selected area of 100micron by 100 micron and the peaks of the D-band, G-band and the second order modes were observed from the Raman spectra. Image j image processing software was also used for the extraction of the diameter of the nanotube in which the average diameter was computed to be 46nm.