表达了微波等离子体化学材料加工中最佳气体压力的测定方法

2010 20th International Crimean Conference "Microwave & Telecommunication Technology" Pub Date : 2010-11-11 DOI:10.1109/CRMICO.2010.5632811

S. V. Bordusov, S. I. Madveiko, A. Dostanko

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摘要

提出了一种快速测定气体压力值的方法，为低真空微波等离子体化学处理提供了最有利的条件。该方法是基于微波等离子体材料加工的特性，即微波放电的脉动特性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Express method of determination of the gas pressure optimal for microwave plasma chemical materials processing

A method of rapid determination of gas pressure value, which provides the most favorable conditions for microwave plasma chemical processing at low vacuum, is developed. The method is based on the characteristic property of microwave plasma materials processing which consists in pulsation nature of microwave discharge.

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2010 20th International Crimean Conference "Microwave & Telecommunication Technology"

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