常压等离子体射流沉积聚苯乙烯TiN薄膜的制备及性能研究

F. Kong, Penghao Zhang, C. Ren, Cheng Zhang, T. Shao
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引用次数: 1

摘要

对于高压真空灭弧器和气体绝缘开关设备来说,介电/真空和介电/空气界面的表面闪络有时会导致绝缘失效,制约了高压电气设备的发展。介质表面电荷的动态特性与表面闪络密切相关。在介质表面沉积薄膜被认为是一种很有前途的提高介质表面绝缘性能的方法。本文提出了一种利用常压等离子体射流沉积TiN薄膜的方法。讨论了TiN薄膜等离子体改性前后介质表面的电学性能。镀有TiN膜的样品直流闪络电压明显提高。
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Preparation and Properties of Polystyrene Deposited with TiN Film Using Atmospheric-Pressure Plasma Jet
For the high voltage vacuum interrupter and GIS (Gas insulated switchgear), surface flashover at the dielectric/vacuum and dielectric/air interfaces result in the insulation failure sometimes, which restricts the development of high voltage electrical equipment. The dynamic performances of surface charges on the dielectric are associated with surface flashover closely. Film deposition on the dielectric surface is regarded as a promising mothed to improve surface insulating performance of dielectric material. In this paper, a TiN film deposition method of using atmospheric-pressure plasma jet (APPJ) is proposed. Before and after the plasma modification with TiN film, the electrical properties of dielectric surface are discussed, respectively. The DC flashover voltage of sample with TiN film is increased obviously.
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