2:1 MUX and OR Logic Functions Using Triple Partial Electrodes: Toward Cascadable MEMS Logic Devices

In the era of IoT and smarter sensors and actuators, MEMS resonators are actively being explored for ultra-low-power computing devices due to their simplicity and potential toward energy-efficient computing machines. However, the realization of complex logic functions through the cascadability of MEMS resonator logic devices has introduced new challenges that require both the logic input and logic output signals to be based on AC signals at the same frequency. Toward these challenges, this study demonstrates 2:1 MUX function and OR gate with improved energy efficiency based on activation and deactivation of the third vibrational mode of an arch microbeam resonator with a pair of three partial electrodes.