A new design concept for MEMS capacitive pressure sensors is presented that can be used to improve the linearity of the capacitance-pressure (C-T) response of the sensor. The sensor uses an extra dimple mask and etching step in the fabrication process of the device to create small bumps under the pressure sensitive and flexible membrane. Different designs, including a conventional sensor, are modeled and simulated using FEM coupled-field multiphysics solver in ANSYS®. Polycrystalline silicon is used as the structural material in the simulations. Coefficient of linear correlation between device capacitance and ambient pressure is used as the linearity factor to quantitatively compare the performance of different sensors. The finite element analysis show that the linearity factor improves from 0.938 for a conventional design to 0.973 for a design with a central bump. For a design with five bumps (one at the center of membrane and four off-center) the linearity factor increases to 0.997 for bumps of 1.5 μm thickness for wide pressure range of 0.0–4.0 MPa. The proposed design can be tailored for different applications that require certain sensor materials or different pressure ranges by using optimized sensor dimensions.
{"title":"Improving Linearity of Circular Capacitive Pressure Sensor by Using a Dimple Mask","authors":"Ebrahim Khalil Bhuiyan, M. Shavezipur","doi":"10.1115/detc2020-22497","DOIUrl":"https://doi.org/10.1115/detc2020-22497","url":null,"abstract":"\u0000 A new design concept for MEMS capacitive pressure sensors is presented that can be used to improve the linearity of the capacitance-pressure (C-T) response of the sensor. The sensor uses an extra dimple mask and etching step in the fabrication process of the device to create small bumps under the pressure sensitive and flexible membrane. Different designs, including a conventional sensor, are modeled and simulated using FEM coupled-field multiphysics solver in ANSYS®. Polycrystalline silicon is used as the structural material in the simulations. Coefficient of linear correlation between device capacitance and ambient pressure is used as the linearity factor to quantitatively compare the performance of different sensors. The finite element analysis show that the linearity factor improves from 0.938 for a conventional design to 0.973 for a design with a central bump. For a design with five bumps (one at the center of membrane and four off-center) the linearity factor increases to 0.997 for bumps of 1.5 μm thickness for wide pressure range of 0.0–4.0 MPa. The proposed design can be tailored for different applications that require certain sensor materials or different pressure ranges by using optimized sensor dimensions.","PeriodicalId":229776,"journal":{"name":"Volume 1: 14th International Conference on Micro- and Nanosystems (MNS)","volume":"177 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-08-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121798904","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
In this work, we show the computational potential of MEMS devices by predicting the dynamics of a 10th order nonlinear auto-regressive moving average (NARMA10) dynamical system. Modeling this system is considered complex due to its high nonlinearity and dependency on its previous values. To model the NARMA10 system, we used a reservoir computing scheme by utilizing one MEMS device as a reservoir, produced by the interaction of 100 virtual nodes. The virtual nodes are attained by sampling the input of the MEMS device and modulating this input using a random modulation mask. The interaction between virtual nodes within the system was produced through delayed feedback and temporal dependence. Using this approach, the MEMS device was capable of adequately capturing the NARMA10 response with a normalized root mean square error (NRMSE) = 6.18% and 6.43% for the training and testing sets, respectively. In practice, the MEMS device would be superior to simulated reservoirs due to its ability to perform this complex computing task in real time.
{"title":"Nonlinear Time-Series Prediction Using a Single MEMS Reservoir","authors":"M. Hasan, F. Alsaleem","doi":"10.1115/detc2020-22671","DOIUrl":"https://doi.org/10.1115/detc2020-22671","url":null,"abstract":"\u0000 In this work, we show the computational potential of MEMS devices by predicting the dynamics of a 10th order nonlinear auto-regressive moving average (NARMA10) dynamical system. Modeling this system is considered complex due to its high nonlinearity and dependency on its previous values. To model the NARMA10 system, we used a reservoir computing scheme by utilizing one MEMS device as a reservoir, produced by the interaction of 100 virtual nodes. The virtual nodes are attained by sampling the input of the MEMS device and modulating this input using a random modulation mask. The interaction between virtual nodes within the system was produced through delayed feedback and temporal dependence. Using this approach, the MEMS device was capable of adequately capturing the NARMA10 response with a normalized root mean square error (NRMSE) = 6.18% and 6.43% for the training and testing sets, respectively. In practice, the MEMS device would be superior to simulated reservoirs due to its ability to perform this complex computing task in real time.","PeriodicalId":229776,"journal":{"name":"Volume 1: 14th International Conference on Micro- and Nanosystems (MNS)","volume":"11 7","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-08-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132434183","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
The present work introduces a novel design that linearizes the characteristic capacitance-pressure (C-P) response of the pressure sensor in contact mode. The design relies on patterning the insulating (dielectric) layer that separates the two electrodes of the device when the device is in contact mode. Since the capacitance is inversely proportional to the gap between the electrodes and the dielectric constant of the insulating layer is several times more than that of air (or vacuum), the contact region of the two electrodes makes more significant contribution to the overall capacitance of the system. Therefore, if the dielectric layer is properly patterned, the shape of C-P response can be controlled. In this work, we focus on linearity of the sensor response, and design and optimize dielectric pattern to achieve the highest linearity. Finite element simulations are used to demonstrate the applicability of the design concept. Different sensor designs are modeled and simulated using ANSYS® Multiphysics solver and their responses are compared to that of a conventional capacitive pressure sensor. Coefficient of linear correlation between pressure and capacitance is used as a quantitative measure for improvement of linearity. The simulation results show that the linearity of the C-P response improves from 0.930 in a 600 μm-diameter conventional design to 0.978 for a sensor with patterned dielectric layer. Moreover, a smaller sensor with 300 μm diameter display linearity of 0.999 over a 1.25 MPa – 5.0 MPa pressure range.
{"title":"Linearization of Characteristic Response of a Capacitive MEMS Pressure Sensor by Patterning the Dielectric Layer","authors":"N. Tolouei, M. Shavezipur","doi":"10.1115/detc2020-22210","DOIUrl":"https://doi.org/10.1115/detc2020-22210","url":null,"abstract":"\u0000 The present work introduces a novel design that linearizes the characteristic capacitance-pressure (C-P) response of the pressure sensor in contact mode. The design relies on patterning the insulating (dielectric) layer that separates the two electrodes of the device when the device is in contact mode. Since the capacitance is inversely proportional to the gap between the electrodes and the dielectric constant of the insulating layer is several times more than that of air (or vacuum), the contact region of the two electrodes makes more significant contribution to the overall capacitance of the system. Therefore, if the dielectric layer is properly patterned, the shape of C-P response can be controlled. In this work, we focus on linearity of the sensor response, and design and optimize dielectric pattern to achieve the highest linearity. Finite element simulations are used to demonstrate the applicability of the design concept. Different sensor designs are modeled and simulated using ANSYS® Multiphysics solver and their responses are compared to that of a conventional capacitive pressure sensor. Coefficient of linear correlation between pressure and capacitance is used as a quantitative measure for improvement of linearity. The simulation results show that the linearity of the C-P response improves from 0.930 in a 600 μm-diameter conventional design to 0.978 for a sensor with patterned dielectric layer. Moreover, a smaller sensor with 300 μm diameter display linearity of 0.999 over a 1.25 MPa – 5.0 MPa pressure range.","PeriodicalId":229776,"journal":{"name":"Volume 1: 14th International Conference on Micro- and Nanosystems (MNS)","volume":"207 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-08-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114303415","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Due to the increasing demand for smarter solutions and embedded systems, MEMS resonator-based computing devices have been under considerable attention for their simplicity and prospect of low computational power. However, most complex logic functions require multi-input/output lines that are cascadable such that the outputs of one device can be used as inputs into subsequent devices for practical applications, and this is a current limitation for MEMS logic devices. In this study, we demonstrate multi-inputs/outputs half-adder function, AND, and XOR logic gates on the basis of activating and deactivating the localization and delocalization of the multi vibrational modes of a single MEMS resonator with improved energy efficiency.
{"title":"Multi-Inputs/Outputs and Cascadable MEMS Resonator-Based Computing Devices","authors":"S. A. Tella, M. Younis","doi":"10.1115/detc2020-22594","DOIUrl":"https://doi.org/10.1115/detc2020-22594","url":null,"abstract":"\u0000 Due to the increasing demand for smarter solutions and embedded systems, MEMS resonator-based computing devices have been under considerable attention for their simplicity and prospect of low computational power. However, most complex logic functions require multi-input/output lines that are cascadable such that the outputs of one device can be used as inputs into subsequent devices for practical applications, and this is a current limitation for MEMS logic devices. In this study, we demonstrate multi-inputs/outputs half-adder function, AND, and XOR logic gates on the basis of activating and deactivating the localization and delocalization of the multi vibrational modes of a single MEMS resonator with improved energy efficiency.","PeriodicalId":229776,"journal":{"name":"Volume 1: 14th International Conference on Micro- and Nanosystems (MNS)","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-08-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114406407","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Cheng-Yi Li, Changde Peng, S. Hsu, Cheng-Chung Chang, Gou-Jen Wang
In this study, a metal enhanced fluorescence (MEF) approach using the homemade Ag nanowires for enzyme free and electrodeless detection of direct bilirubin (d-BLR) was successfully developed. The average diameter and length of the fabricated Ag nanowires were measured to be around 80 nm and 25 μm, respectively. Solvent effect experiments found that EtOH is more suitable as the solvent for d-BLR. The experimental results found that the linear detection range is from 1 to 10 μM, which can be used for detecting abnormal d-BLR concentration from 5 to 10 μM. The MEF approach not only enhanced the bilirubin fluorescence, but also improved the linearity of the standard curve. Furthermore, we also found that the fluorescence intensity of the chip-based MEF is much higher than that of the solution-based MEF. It is believed that the proposed enzyme free and electrodeless d-BLR detection platform is highly feasible for clinical applications.
{"title":"Non-Enzymatic and Electrodeless Detection of Direct Bilirubin Using Metal Enhanced Fluorescence Effect","authors":"Cheng-Yi Li, Changde Peng, S. Hsu, Cheng-Chung Chang, Gou-Jen Wang","doi":"10.1115/detc2020-22022","DOIUrl":"https://doi.org/10.1115/detc2020-22022","url":null,"abstract":"\u0000 In this study, a metal enhanced fluorescence (MEF) approach using the homemade Ag nanowires for enzyme free and electrodeless detection of direct bilirubin (d-BLR) was successfully developed. The average diameter and length of the fabricated Ag nanowires were measured to be around 80 nm and 25 μm, respectively. Solvent effect experiments found that EtOH is more suitable as the solvent for d-BLR. The experimental results found that the linear detection range is from 1 to 10 μM, which can be used for detecting abnormal d-BLR concentration from 5 to 10 μM. The MEF approach not only enhanced the bilirubin fluorescence, but also improved the linearity of the standard curve. Furthermore, we also found that the fluorescence intensity of the chip-based MEF is much higher than that of the solution-based MEF. It is believed that the proposed enzyme free and electrodeless d-BLR detection platform is highly feasible for clinical applications.","PeriodicalId":229776,"journal":{"name":"Volume 1: 14th International Conference on Micro- and Nanosystems (MNS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-08-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129570190","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A novel design for laterally actuated nanoelectromechanical (NEM) relays with flexible source-drain contact is presented. The design uses a thin curved source that can provide expandable contact area between the source and the drain in ON-STATE position. The presence of the thin film curved source creates a local nonlinear stiffness in addition to the main stiffness of the source beam. This additional stiffness not only controls the contact area with over-drive voltage after the pull-in, but can also generate repulsive force when the actuation voltage is removed to separate the two contacting surfaces. The additional repulsive force creates a “peel-off” separation mechanism and can overcome relatively large adhesion forces. Finite element simulations are used to verify the applicability of this design and ANSYS® APDL structural solver and contact technology is used to determine the nonlinear stiffness of the curved source and also to simulate the stiction and repulsive forces generated in the curved source. Curved source structures with different curvatures are simulated to examine the applicability of the design idea in overcoming the adhesion between source and drain. FEM results demonstrate that secondary structural stiffness created at the source-drain contact can overcome large adhesion stress and allow the separation in a peel-off mechanism after the actuation voltage is removed.
{"title":"Design and Simulations of a Novel Stiction-Free Laterally Actuated NEM Relay With Flexible Source-Drain Contact","authors":"Mehrdad Zandigohar, M. Shavezipur","doi":"10.1115/detc2020-22721","DOIUrl":"https://doi.org/10.1115/detc2020-22721","url":null,"abstract":"\u0000 A novel design for laterally actuated nanoelectromechanical (NEM) relays with flexible source-drain contact is presented. The design uses a thin curved source that can provide expandable contact area between the source and the drain in ON-STATE position. The presence of the thin film curved source creates a local nonlinear stiffness in addition to the main stiffness of the source beam. This additional stiffness not only controls the contact area with over-drive voltage after the pull-in, but can also generate repulsive force when the actuation voltage is removed to separate the two contacting surfaces. The additional repulsive force creates a “peel-off” separation mechanism and can overcome relatively large adhesion forces. Finite element simulations are used to verify the applicability of this design and ANSYS® APDL structural solver and contact technology is used to determine the nonlinear stiffness of the curved source and also to simulate the stiction and repulsive forces generated in the curved source. Curved source structures with different curvatures are simulated to examine the applicability of the design idea in overcoming the adhesion between source and drain. FEM results demonstrate that secondary structural stiffness created at the source-drain contact can overcome large adhesion stress and allow the separation in a peel-off mechanism after the actuation voltage is removed.","PeriodicalId":229776,"journal":{"name":"Volume 1: 14th International Conference on Micro- and Nanosystems (MNS)","volume":"48 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-08-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131211357","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
In the era of IoT and smarter sensors and actuators, MEMS resonators are actively being explored for ultra-low-power computing devices due to their simplicity and potential toward energy-efficient computing machines. However, the realization of complex logic functions through the cascadability of MEMS resonator logic devices has introduced new challenges that require both the logic input and logic output signals to be based on AC signals at the same frequency. Toward these challenges, this study demonstrates 2:1 MUX function and OR gate with improved energy efficiency based on activation and deactivation of the third vibrational mode of an arch microbeam resonator with a pair of three partial electrodes.
{"title":"2:1 MUX and OR Logic Functions Using Triple Partial Electrodes: Toward Cascadable MEMS Logic Devices","authors":"S. A. Tella, M. Younis","doi":"10.1115/detc2020-22586","DOIUrl":"https://doi.org/10.1115/detc2020-22586","url":null,"abstract":"\u0000 In the era of IoT and smarter sensors and actuators, MEMS resonators are actively being explored for ultra-low-power computing devices due to their simplicity and potential toward energy-efficient computing machines. However, the realization of complex logic functions through the cascadability of MEMS resonator logic devices has introduced new challenges that require both the logic input and logic output signals to be based on AC signals at the same frequency. Toward these challenges, this study demonstrates 2:1 MUX function and OR gate with improved energy efficiency based on activation and deactivation of the third vibrational mode of an arch microbeam resonator with a pair of three partial electrodes.","PeriodicalId":229776,"journal":{"name":"Volume 1: 14th International Conference on Micro- and Nanosystems (MNS)","volume":"80 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-08-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126422200","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Chemical and biological detection using Electrochemistry Impedance Spectroscopy (EIS) highly depends on the electrical characteristics of the electrodes used in the measurement process. In this work, the effect of surface coating on behavior of interdigitated impedance-based biochemical sensors is studied. Two interdigitated sensors with the same geometry and different electrode materials are fabricated using a standard process. One electrode is made of gold and the other electrode is made of polycrystalline silicon covered with a thin layer of native silicon dioxide. Different concentrations of di(2-ethylhexyl) phthalate (DEHP) in water are used and the Nyquist responses of the two sensors exposed to these solutions are obtained. The measurement results show that at high frequency both sensors form double-layer capacitance values on their electrode surfaces, however, the silicon sensor has a much lower double-layer capacitance values, because formation of oxide layer adds to the gap between charges at the interface of the electrode and the solution. Moreover, comparing the low frequency regions of the Nyquist plots for two sensors shows that the presence of oxide layer affects the Warburg effect and the charge diffusion near the surface of the electrode, creating an extra capacitive element in series with the diffusion effect. The results of this work may be extended to other interdigitated biochemical sensors that may have other sources of contamination on their surfaces.
{"title":"Investigation of the Effect of Native Oxide Layer on Performance of Interdigitated Impedance-Based Silicon Biochemical Sensors","authors":"N. Tolouei, Shima Ghamari, M. Shavezipur","doi":"10.1115/detc2020-22207","DOIUrl":"https://doi.org/10.1115/detc2020-22207","url":null,"abstract":"\u0000 Chemical and biological detection using Electrochemistry Impedance Spectroscopy (EIS) highly depends on the electrical characteristics of the electrodes used in the measurement process. In this work, the effect of surface coating on behavior of interdigitated impedance-based biochemical sensors is studied. Two interdigitated sensors with the same geometry and different electrode materials are fabricated using a standard process. One electrode is made of gold and the other electrode is made of polycrystalline silicon covered with a thin layer of native silicon dioxide. Different concentrations of di(2-ethylhexyl) phthalate (DEHP) in water are used and the Nyquist responses of the two sensors exposed to these solutions are obtained. The measurement results show that at high frequency both sensors form double-layer capacitance values on their electrode surfaces, however, the silicon sensor has a much lower double-layer capacitance values, because formation of oxide layer adds to the gap between charges at the interface of the electrode and the solution. Moreover, comparing the low frequency regions of the Nyquist plots for two sensors shows that the presence of oxide layer affects the Warburg effect and the charge diffusion near the surface of the electrode, creating an extra capacitive element in series with the diffusion effect. The results of this work may be extended to other interdigitated biochemical sensors that may have other sources of contamination on their surfaces.","PeriodicalId":229776,"journal":{"name":"Volume 1: 14th International Conference on Micro- and Nanosystems (MNS)","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-08-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128904596","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
N. Tolouei, Ebrahim Khalil Bhuiyan, M. Hankins, M. Shavezipur
Presence of toxic chemicals in food products due to the use of different synthetic materials in food packages may cause long-term health hazard. Addition of chemical components such as phthalate family (for instance, Di(2-ethylhexyl) phthalate, DEHP) to plastics may result in diffusion of these materials in food specially in liquids such as bottled soft drink, water and juice. In this work, we present a chemical sensor that can detect DEHP in orange juice at extremely low concentrations. The sensor is made of two interdigitated electrodes, and electrochemical impedance spectroscopy (EIS) is used for the detection. Sensors with different overall dimensions and finger/gap sizes were fabricated using a polycrystalline silicon standard foundry. For simplification of the experiments, low concentration of citric acid in water (similar to orange juice) is used to represent the orange juice. The sensors are exposed to different concentrations of DEHP and their Nyquist and impedance-frequency plots are studied. The experimental data shows that the sensors can distinctly capture low concentrations of DEHP in the juice solution. An electrical model is developed that can simulate the frequency response of the system containing the sensor and the solution. The model includes dynamic physical parameters such as double-layer capacitance, solution resistance and Warburg impedance that can be used in detection. EIS curves fit to experimental data shows that the model well fits the experimental data.
{"title":"Development of a MEMS Chemical Sensor for Detection of Phthalates in Juice Using Electrochemical Impedance Spectroscopy","authors":"N. Tolouei, Ebrahim Khalil Bhuiyan, M. Hankins, M. Shavezipur","doi":"10.1115/detc2020-22185","DOIUrl":"https://doi.org/10.1115/detc2020-22185","url":null,"abstract":"\u0000 Presence of toxic chemicals in food products due to the use of different synthetic materials in food packages may cause long-term health hazard. Addition of chemical components such as phthalate family (for instance, Di(2-ethylhexyl) phthalate, DEHP) to plastics may result in diffusion of these materials in food specially in liquids such as bottled soft drink, water and juice. In this work, we present a chemical sensor that can detect DEHP in orange juice at extremely low concentrations. The sensor is made of two interdigitated electrodes, and electrochemical impedance spectroscopy (EIS) is used for the detection. Sensors with different overall dimensions and finger/gap sizes were fabricated using a polycrystalline silicon standard foundry. For simplification of the experiments, low concentration of citric acid in water (similar to orange juice) is used to represent the orange juice. The sensors are exposed to different concentrations of DEHP and their Nyquist and impedance-frequency plots are studied. The experimental data shows that the sensors can distinctly capture low concentrations of DEHP in the juice solution. An electrical model is developed that can simulate the frequency response of the system containing the sensor and the solution. The model includes dynamic physical parameters such as double-layer capacitance, solution resistance and Warburg impedance that can be used in detection. EIS curves fit to experimental data shows that the model well fits the experimental data.","PeriodicalId":229776,"journal":{"name":"Volume 1: 14th International Conference on Micro- and Nanosystems (MNS)","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-08-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124802465","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Lab on Chips (LOCs) are devices, mostly based on microfluidics, that allow to perform one or several chemical, biochemical or biological analysis in a miniaturized format on a single chip. The Additive Manufacturing processes, and in particular the Digital Light Processing stereolithography (DLP-SLA), could quickly produce a complete LOC with high resolution 3D features in a single step, i.e. without the need for assembly processes, and using low cost and user-friendly desktop machines. However, the potential of DLP-SLA to produce non-planar channels or channels with complex sections has not been fully investigated yet. This study proposes a benchmark artifact (including also some channels with their axis lying in a plane parallel to the machine building platform) aiming at assessing the capability and performance of DLP-SLA for manufacturing microfeatures for microfluidic devices. A proper experimental campaign was performed to evaluate the effect of the main process parameters (namely, layer thickness and exposure time) on the process performance. The results pointed out that both the process parameters influence the quality and dimensional accuracy of the analyzed features.
{"title":"Experimental Investigation of Microfluidic Feature Manufacturing by Digital Light Processing Stereolithography","authors":"Lara Rebaioli, I. Fassi","doi":"10.1115/detc2020-22415","DOIUrl":"https://doi.org/10.1115/detc2020-22415","url":null,"abstract":"\u0000 Lab on Chips (LOCs) are devices, mostly based on microfluidics, that allow to perform one or several chemical, biochemical or biological analysis in a miniaturized format on a single chip. The Additive Manufacturing processes, and in particular the Digital Light Processing stereolithography (DLP-SLA), could quickly produce a complete LOC with high resolution 3D features in a single step, i.e. without the need for assembly processes, and using low cost and user-friendly desktop machines. However, the potential of DLP-SLA to produce non-planar channels or channels with complex sections has not been fully investigated yet. This study proposes a benchmark artifact (including also some channels with their axis lying in a plane parallel to the machine building platform) aiming at assessing the capability and performance of DLP-SLA for manufacturing microfeatures for microfluidic devices. A proper experimental campaign was performed to evaluate the effect of the main process parameters (namely, layer thickness and exposure time) on the process performance. The results pointed out that both the process parameters influence the quality and dimensional accuracy of the analyzed features.","PeriodicalId":229776,"journal":{"name":"Volume 1: 14th International Conference on Micro- and Nanosystems (MNS)","volume":"236 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-08-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127795405","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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