铜柱(CuP)倒装芯片封装器件中高阻路径的检测与故障隔离

C. Ison, R. Spurrier, M. Somintac, R. Asuncion
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摘要

对更高的输入/输出(I/O)能力、更小的封装占地面积、低成本、良好的电气性能和更好的电迁移性能的需求,使铜柱(CuP)碰撞成为近年来制造的倒装芯片器件中出色的一级互连。新封装技术(如CuP倒装芯片)的成功验证取决于稳健的封装设计、最优且稳定的组装工艺、全面的应力计划,同样重要的是,电气测试方法的开发可以检测出由应力加剧的问题,以及故障隔离方法的可用性,从而从根本上解决这些故障。在本文中,我们提出了通过边界扫描测试检测温度循环加剧的内在和外在CuP碰撞互连可靠性问题。提出了CuP倒装封装设计的电气和物理失效分析方法,用于故障的根源分析。此外,还讨论了改进组装工艺以解决外部失效模式的根本原因,以及改进互连设计以消除制造工艺/封装设计对可靠性测试旨在暴露的内在失效机制的贡献。
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Detection and Fault Isolation of Elevated Resistive Paths in Copper Pillar (CuP) Flip Chip Package Device
The demand for higher input/output (I/O) capability, smaller package footprint, low cost, combined with good electrical properties and better electromigration performance has made the copper pillar (CuP) bump an excellent first-level interconnect in flip chip devices built in the recent years. The ability to successfully qualify a new package technology, for this case, CuP flip chip, is dependent on a robust package design, an optimal and stable assembly process, a comprehensive stress plan, and of equal importance, is the development of an electrical test methodology that can detect issues exacerbated by the stress, as well as, the availability of fault isolation methods to rootcause these failures. In this paper, we present the detection of both intrinsic and extrinsic CuP bump interconnect reliability issues exacerbated by temperature cycling through the boundary scan test. The CuP flip chip package-designed electrical and physical failure analyses (FA) used to rootcause the failures were presented. Assembly process improvements to address the root cause of the extrinsic failure modes, as well as interconnect design improvements, to eliminate the contribution of the manufacturing process/package design to the intrinsic failure mechanisms reliability testing aims to expose, were also discussed.
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