Tong Zhou, Lei Ding, Han Liu, Yun Xu, B. Jiang, Yan Su
{"title":"具有自动扫频功能的二维MEMS扫描镜驱动电路","authors":"Tong Zhou, Lei Ding, Han Liu, Yun Xu, B. Jiang, Yan Su","doi":"10.1109/ICCCAS.2018.8769324","DOIUrl":null,"url":null,"abstract":"This paper proposes a two-dimensional (2-D) scanning micromirror drive circuit with auto frequency scan function, which solves the problem of complication of manual calibration for the scanning mirror. It can realize the automatic frequency calibration and high-precision control for the two-dimensional scanning micro mirror, which is characterized by high scanning range and high intelligence. Proposed drive circuit has been validated by the experiment results, and the horizontal and vertical swing angles are greater than ±23.6 and ±5.7 degrees respectively when voltage is 5V, which achieves high-resolution position sensing and wide-angle horizontal scanning.","PeriodicalId":166878,"journal":{"name":"2018 10th International Conference on Communications, Circuits and Systems (ICCCAS)","volume":"49 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Two-dimensional MEMS Scanning Mirror Driving Circuit with Auto Frequency Scan Function\",\"authors\":\"Tong Zhou, Lei Ding, Han Liu, Yun Xu, B. Jiang, Yan Su\",\"doi\":\"10.1109/ICCCAS.2018.8769324\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper proposes a two-dimensional (2-D) scanning micromirror drive circuit with auto frequency scan function, which solves the problem of complication of manual calibration for the scanning mirror. It can realize the automatic frequency calibration and high-precision control for the two-dimensional scanning micro mirror, which is characterized by high scanning range and high intelligence. Proposed drive circuit has been validated by the experiment results, and the horizontal and vertical swing angles are greater than ±23.6 and ±5.7 degrees respectively when voltage is 5V, which achieves high-resolution position sensing and wide-angle horizontal scanning.\",\"PeriodicalId\":166878,\"journal\":{\"name\":\"2018 10th International Conference on Communications, Circuits and Systems (ICCCAS)\",\"volume\":\"49 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2018 10th International Conference on Communications, Circuits and Systems (ICCCAS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICCCAS.2018.8769324\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 10th International Conference on Communications, Circuits and Systems (ICCCAS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICCCAS.2018.8769324","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Two-dimensional MEMS Scanning Mirror Driving Circuit with Auto Frequency Scan Function
This paper proposes a two-dimensional (2-D) scanning micromirror drive circuit with auto frequency scan function, which solves the problem of complication of manual calibration for the scanning mirror. It can realize the automatic frequency calibration and high-precision control for the two-dimensional scanning micro mirror, which is characterized by high scanning range and high intelligence. Proposed drive circuit has been validated by the experiment results, and the horizontal and vertical swing angles are greater than ±23.6 and ±5.7 degrees respectively when voltage is 5V, which achieves high-resolution position sensing and wide-angle horizontal scanning.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
