一种基于MEMS技术的太赫兹波导滤波器

2019 IEEE MTT-S International Wireless Symposium (IWS) Pub Date : 2019-05-01 DOI:10.1109/IEEE-IWS.2019.8803867

G. Shan, N. Zhang, Z. Yan, C. Shek

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引用次数: 0

摘要

提出了一种基于MEMS技术的高性能0.34THz波导滤波器。研究了制造误差与滤波器性能之间的关系，并给出了定量模型。对于虹膜结构，制造几何公差可控制在5%以下(谐振腔为±5μm)。测试结果与仿真结果吻合良好，当制造误差小于~5µm时，测试结果显示在~5.29%的相对带宽下，插入性能为~0.5dB。

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A Novel Terahertz Waveguide Filter Based on MEMS Technology

This paper presents high performance 0.34THz waveguide filters based on MEMS technology. The relationship between fabrication error and filter performance was studied and a quantitative model is given. The fabrication geometrical tolerance can be controlled to be lower than 5% for iris structures (and ±5μm for resonant cavities). Our test results show a good agreement with simulation results when fabrication error is less than ~5 µm, the test result shows a performance of ~0.5dB insertion with ~5.29% relative bandwidth.

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2019 IEEE MTT-S International Wireless Symposium (IWS)

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