非晶硅RRAM器件中Ag相互作用的理论研究

K. Patel, J. Cottom, M. Bosman, A. Kenyon, A. Shluger
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引用次数: 6

摘要

在这项研究中,密度泛函理论(DFT)计算用于模拟Ag/a-Si02/Pt电阻随机存取存储器(RRAM)器件中Ag的掺入和扩散。Ag聚类机制对于理解器件的运行是至关重要的,但目前尚不清楚。本文提出了一个O空位(Vo)介导的簇模型,其中Vo被确定为$\ mathm {Ag}^{+}$还原的主要位点。$\mathrm{Ag}^{+}$间隙在Ag和Pt的费米能处具有能量优势,表明$\mathrm{Ag}^{+}$离子在Pt电极上没有通过电子隧穿作用被还原。相反,$\mathrm{Ag}^{+}$离子与Vo结合形成$[\mathrm{Ag}/\mathrm{Vo}]^{+}$络合物,通过空位中Si原子的电荷转移减少$\mathrm{Ag}^{+}$。$[\mathrm{Ag}/\mathrm{Vo}]^{+}$配合物能够捕获一个电子,形成$[\mathrm{Ag}/\mathrm{Vo}]^{0}$,在Pt的费米能量下形成$[\mathrm{Ag}2/\mathrm{Vo}]^{+}$。该配合物随后能够作为银聚集的成核位点,形成$[\mathrm{Ag}2/\mathrm{Vo}]^{+}$。
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Theoretical Study of Ag Interactions in Amorphous Silica RRAM Devices
In this study, Density Functional Theory (DFT) calculations were used to model the incorporation and diffusion of Ag in Ag/a-Si02/Pt resistive random-access memory (RRAM) devices. The Ag clustering mechanism is vital for understanding device operation and at this stage is unknown. In this paper an O vacancy (Vo) mediated cluster model is presented, where the Vo is identified as the principle site for $\mathrm{Ag}^{+}$ reduction. The $\mathrm{Ag}^{+}$ interstitial is energetically favored at the Fermi energies of Ag and Pt, indicating that $\mathrm{Ag}^{+}$ ions are not reduced at the Pt electrode via electron tunneling. Instead, $\mathrm{Ag}^{+}$ ions bind to Vo forming the $[\mathrm{Ag}/\mathrm{Vo}]^{+}$ complex, reducing $\mathrm{Ag}^{+}$ via charge transfer from the Si atoms in the vacancy. The $[\mathrm{Ag}/\mathrm{Vo}]^{+}$ complex is then able to trap an electron forming $[\mathrm{Ag}/\mathrm{Vo}]^{0}$ at the Fermi energy of Pt. This complex is then able to act as a nucleation site for of Ag clustering with the formation of $[\mathrm{Ag}2/\mathrm{Vo}]^{+}$ which is reduced by the above mechanism.
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