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引用次数: 0

摘要

介绍了中功率磁控管技术微波系统的组成原理。对各种系统类型的发展前景(在产品处理均匀性和施工模块化方面)进行了形成和估计,并给出了实验结果。
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Development of microwave multi-magnetron equipment for modern technologies
The composition principles of technological microwave systems based on middle-power level magnetrons have been observed. Development prospects (with respect to product treatment uniformity and construction modularity) for various system types are formed and estimated, and experimental results are presented.
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