采用MEMS耦合传输线实现低相位噪声的13GHz CMOS分布式振荡器

2004 IEEE International Solid-State Circuits Conference (IEEE Cat. No.04CH37519) Pub Date : 2004-09-13 DOI:10.1109/ISSCC.2004.1332715

Eun-Chul Park, E. Yoon

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引用次数: 6

摘要

采用低损耗MEMS耦合传输线设计了一种耦合分布式振荡器，相位噪声改善7dB, MEMS传输线额外改善2dB。振荡器以0.18/spl mu/m的6M CMOS工艺制造，工作在1V电源下，功耗为26mW。

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A 13GHz CMOS distributed oscillator using MEMS coupled transmission lines for low phase noise

A coupled distributed oscillator is designed using low-loss MEMS coupled transmission lines to achieve phase noise improvement of 7dB, and an additional 2dB improvement is attributed to the MEMS transmission lines. The oscillators are fabricated in a 0.18/spl mu/m 6M CMOS process, operate with a 1V supply and consume 26mW.

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2004 IEEE International Solid-State Circuits Conference (IEEE Cat. No.04CH37519)

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