化学浴沉积法制备硫化镉薄膜

T. Pisarkiewicz, E. Schabowska-Osiowska, E. Kusior
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引用次数: 6

摘要

本工作的目的是研究CBD在商用玻璃和透明导电氧化物(TCO)衬底玻璃上生长CdS。TCO和CdS都是影响电池光伏响应的窗口层。CBD技术提供了在粗糙的基材表面沉积厚度最小的均匀薄膜的可能性。在非镀膜玻璃基底上生长CdS,优化了沉积参数,如CdSO/sub 4/、NH/sub 3/和硫脲SC(NH/sub 2/)浓度、镀液温度和沉积时间。先后用涂有TCO (SnO/sub 2/, ZnO)层的玻璃板作为衬底。研究了生长样品和空气退火样品。利用Perkin - Elmer Lambda 19分光光度计对CdS和CdS/ TCO双分子层在350 ~ 2200nm范围内的光透射率进行了研究,评价了热处理工艺参数对CdS和CdS/ TCO双分子层光学性能的影响。SEM和AFM表面形貌研究表明,CdS薄膜再现了多晶TCO亚层的形貌和粗糙度。CBD技术沉积的硫化镉薄膜的适形生长和厚度均匀性可能是其作为CIS太阳能电池缓冲层质量优越的主要原因。
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Cadmium sulfide thin films manufactured by chemical bath deposition method
The objective of this work was the investigation of CdS grown by CBD on commercial glass and glass covered by transparent conductive oxide (TCO) substrates. Both TCO and CdS are window layers influencing the photovoltaic response of the cell. CBD technology offers the possibility of the deposition of a thin uniform film with a minimal thickness on a rough substrate surface. CBD growth of CdS using uncoated glass substrates enabled optimization of deposition parameters, e.g. concentrations of CdSO/sub 4/, NH/sub 3/ and thiourea SC(NH/sub 2/), bath temperature and deposition time. Successively glass plates coated with TCO (SnO/sub 2/, ZnO) layers were used as substrates. Both as-grown and air-annealed samples were studied. Investigation of optical transmission in the range 350 - 2200 nm, using Perkin - Elmer Lambda 19 spectrophotometer enabled the evaluation of heat treatment and selected technological parameters on CdS and CdS/ TCO bilayer optical properties. SEM and AFM surface morphology investigations indicate that CdS films reproduce morphology and roughness of the polycrystalline TCO sublayer. That conformal growth and thickness uniformity of cadmium sulfide thin films deposited by CBD technique are presumably the main reasons of their superior quality as buffer layers in CIS solar cells.
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