{"title":"sb掺杂SnO2薄膜的表面轮廓和光学性质","authors":"S. D. Hutagalung, B.Y. Lee","doi":"10.1109/NEMS.2007.352266","DOIUrl":null,"url":null,"abstract":"Tin oxide (SnO2) and antimony-doped tin oxide (SnO2:Sb) thin films were deposited on the microscope slide glass substrates by sol-gel dip coating technique. Precursor solution was prepared using tin(IV) chloride pentahydrate, antimony chloride, urea, and hydrochloric acid. The Sb dopant concentration was varied from 1 to 4 mol% to investigate the effect of doping on the optical and surface roughness of the films. AFM image showed that undoped films having a very smooth surface morphology with nanostructure grain size in the range of 37.6 to 56.3 nm. Meanwhile, Sb-doped SnO2 was more roughness if compared to undoped one. The optical properties of the films have been studied from transmission spectra in the ultraviolet-visible wavelength range. Energy gap of Sb-doped SnO2 thin films are in the range of 4.07-4.11 eV, shifted to the lower value with increased doping concentration.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"17 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Surface Profile and Optical Properties of Sb-doped SnO2 Thin Films\",\"authors\":\"S. D. Hutagalung, B.Y. Lee\",\"doi\":\"10.1109/NEMS.2007.352266\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Tin oxide (SnO2) and antimony-doped tin oxide (SnO2:Sb) thin films were deposited on the microscope slide glass substrates by sol-gel dip coating technique. Precursor solution was prepared using tin(IV) chloride pentahydrate, antimony chloride, urea, and hydrochloric acid. The Sb dopant concentration was varied from 1 to 4 mol% to investigate the effect of doping on the optical and surface roughness of the films. AFM image showed that undoped films having a very smooth surface morphology with nanostructure grain size in the range of 37.6 to 56.3 nm. Meanwhile, Sb-doped SnO2 was more roughness if compared to undoped one. The optical properties of the films have been studied from transmission spectra in the ultraviolet-visible wavelength range. Energy gap of Sb-doped SnO2 thin films are in the range of 4.07-4.11 eV, shifted to the lower value with increased doping concentration.\",\"PeriodicalId\":364039,\"journal\":{\"name\":\"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems\",\"volume\":\"17 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2007-04-23\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/NEMS.2007.352266\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NEMS.2007.352266","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Surface Profile and Optical Properties of Sb-doped SnO2 Thin Films
Tin oxide (SnO2) and antimony-doped tin oxide (SnO2:Sb) thin films were deposited on the microscope slide glass substrates by sol-gel dip coating technique. Precursor solution was prepared using tin(IV) chloride pentahydrate, antimony chloride, urea, and hydrochloric acid. The Sb dopant concentration was varied from 1 to 4 mol% to investigate the effect of doping on the optical and surface roughness of the films. AFM image showed that undoped films having a very smooth surface morphology with nanostructure grain size in the range of 37.6 to 56.3 nm. Meanwhile, Sb-doped SnO2 was more roughness if compared to undoped one. The optical properties of the films have been studied from transmission spectra in the ultraviolet-visible wavelength range. Energy gap of Sb-doped SnO2 thin films are in the range of 4.07-4.11 eV, shifted to the lower value with increased doping concentration.
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