单次与多次高速液滴撞击覆有液膜壁面的比较

Yoichiro Fukuchi, T. Kondo, K. Ando
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引用次数: 0

摘要

在半导体工业中,液体射流清洗因其清洗效率高、环境负荷小而发挥着重要作用。然而,由于高速和亚微米液滴的实验观察具有挑战性,其清洁机理尚未详细揭示。此外,较高的冲击速度可能会由于撞击产生的水锤冲击载荷而引起表面侵蚀。考虑黏度和压缩率的液滴撞击数值模拟是研究清洁机理和表面侵蚀的有效方法。在以往的研究中,壁面剪切流的产生是通过模拟高速单液滴撞击来评估的。为了评估更实用的射流清洗模型,采用双液滴模拟简化了单分散的液滴排列。在这里,我们数值模拟了两个液滴的撞击,从而可以评估水锤压力和壁面剪应力。我们考虑了两个直径为200 μm的水滴在250 ~ 400 μm之间以50 m/s的速度连续碰撞的情况,液滴之间的距离为250 ~ 400 μm,液滴的刚性壁面上覆盖着厚度为100 μm的水层。模拟基于轴对称流动的可压缩Navier-Stokes方程,两组分的混合出现在由体积平均和平流方程表示的数值扩散界面上。采用能同时捕捉激波和材料界面的有限体积WENO方案求解。在我们的模拟中,二次液滴撞击比单液滴撞击获得更高的剪切应力。当液滴间距为300 μm时,第二次液滴撞击时的最大剪切应力为30.22 kPa,远远大于第一次液滴撞击时的8.42 kPa。结果表明,第二次液滴撞击使第一次液滴撞击引起的壁面剪切流更强。从液滴间距的参数研究可知,壁面剪切应力随水层厚度的减小而增大。第二次液滴撞击时的最大壁面压力为1.96 MPa,大于第一次液滴撞击时的最大壁面压力(1.46 MPa)。通过本研究,可以对射流清洗引起的表面侵蚀进行评价。模拟结果表明,多液滴连续撞击可以获得更高的清洗效率,这将使我们对液体射流清洗技术有一个基本的了解。为了进一步的研究,希望对水柱撞击进行模拟,并对两个水滴撞击的结果进行比较。
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Comparison in High-Speed Droplet Impact Between Single and Multiple Collisions Against a Wall Covered With a Liquid Film
In semiconductor industry, liquid jet cleaning plays an important role because of its high cleaning efficiency and low environmental load. However, its cleaning mechanism is not revealed in detail because the experimental observation of high-speed and sub-micron droplets is challenging. Furthermore, higher impact velocity may give rise to surface erosion due to water-hammer shock loading from the impingement. To study cleaning mechanisms and surface erosion, numerical simulation of droplet impingement accounting for both viscosity and compressibility is an effective approach. In the previous study, wall-shear-flow generation has evaluated from the simulation of high-speed single droplet impingement. To evaluate more practical model of jet cleaning application, simulation of two droplets simplifying mono-dispersed splay of droplet train is favorable. Here, we numerically simulated impingement of two droplets, which allows for evaluating water-hammer pressure and wall shear stress. We consider the case of two water droplets (200 μm in diameter) that collides continuously, at speed 50 m/s, at the inter-droplet distance from 250 to 400 μm, with a no-slip rigid wall covered with a water layer (100 μm in thickness). The simulation is based on compressible Navier-Stokes equations for axisymmetric flow and the mixture of two components appears in numerically diffusion interface expressed by the volume average and advection equation. The simulation is solved by finite-volume WENO scheme that can capture both shock waves and material interface. In our simulation, the impingement of second droplet impingement gain higher shear stress than the single droplet impingement. At the case that the inter-droplet distance is 300 μm, maximum shear stress is 30.22 kPa (at the second droplet impingement), which is much larger than at the first droplet impingement (8.42 kPa). This result indicates how the second droplet impingement make wall shear flow induced by first droplet impingement stronger. From the parameter study of the inter-droplet distance, we can say that wall shear stress gets stronger as water layer thickness decreases. Furthermore, the maximum wall pressure is 1.96 MPa at the second droplet impingement, which is larger than at the first droplet impingement (1.46 MPa). From this study, the evaluation of surface erosion caused by jet cleaning is expected. The simulation suggests that multiple droplets impingement continuously may gain higher cleaning efficiency, which will give us a fundamental insight into liquid jet cleaning technologies. For further study, simulation of water column impingement and comparing the result of impingement of two droplets are expected.
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