T. Miani, T. Verdot, A. Berthelot, F. Maspero, A. Koumela, P. Robert, G. Langfelder, J. Arcamone, M. Sansa
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Nanoresonator-based accelerometer with large bandwidth and improved bias stability
Resonant-beam accelerometers based on nanoresonators have demonstrated that reducing the size of the sensing element allows overcoming the sensitivity-bandwidth trade-off [1]. Here we report on an improvement of the performance of such sensors, through an enhancement of the wafer-level packaging (WLP). We perform a study of the different noise sources present in the system, and we show that an improvement of the vacuum level allows overcoming the thermomechanical noise of the proof mass which – so far – limited the previous generation of sensors.
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