LIDT测试作为优化加工窗口的工具,用于D263玻璃片的TGV处理

Laser Damage Pub Date : 2022-12-02 DOI:10.1117/12.2642866
J. Vanda, Martin Mydlář, Kateřina Pilná, H. Turčičova, Radek Poboril, J. Brajer, T. Mocek, B. Stoklasa, Stepan Venos
{"title":"LIDT测试作为优化加工窗口的工具,用于D263玻璃片的TGV处理","authors":"J. Vanda, Martin Mydlář, Kateřina Pilná, H. Turčičova, Radek Poboril, J. Brajer, T. Mocek, B. Stoklasa, Stepan Venos","doi":"10.1117/12.2642866","DOIUrl":null,"url":null,"abstract":"Laser-Induced Deep Etching (LIDE) is considered as the one of the most promising techniques for production of so-called TGVs (Through Glass Vias). In the production process, thin glass sheet is treated with ultra-short lasers pulses to induce surface and volume modification, allowing efficient wet etching and formation of through hole. Precise knowledge of damage threshold of such glass is essential when optimizing the whole process and scaling up the production via laser beam parallelization. In following paper, we present recent results on LIDT measurement of D263 glass sheets at wavelengths 1030 nm and 515 nm, effective utilization of such knowledge for setting up multi-Bessel beam processing optics, and we demonstrate resulting substrates with TGVs.","PeriodicalId":202227,"journal":{"name":"Laser Damage","volume":"50 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-12-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"LIDT testing as a tool for optimization of processing window for D263 glass sheet TGV treatment\",\"authors\":\"J. Vanda, Martin Mydlář, Kateřina Pilná, H. Turčičova, Radek Poboril, J. Brajer, T. Mocek, B. Stoklasa, Stepan Venos\",\"doi\":\"10.1117/12.2642866\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Laser-Induced Deep Etching (LIDE) is considered as the one of the most promising techniques for production of so-called TGVs (Through Glass Vias). In the production process, thin glass sheet is treated with ultra-short lasers pulses to induce surface and volume modification, allowing efficient wet etching and formation of through hole. Precise knowledge of damage threshold of such glass is essential when optimizing the whole process and scaling up the production via laser beam parallelization. In following paper, we present recent results on LIDT measurement of D263 glass sheets at wavelengths 1030 nm and 515 nm, effective utilization of such knowledge for setting up multi-Bessel beam processing optics, and we demonstrate resulting substrates with TGVs.\",\"PeriodicalId\":202227,\"journal\":{\"name\":\"Laser Damage\",\"volume\":\"50 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-12-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Laser Damage\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2642866\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Laser Damage","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2642866","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

摘要

激光诱导深度蚀刻(LIDE)被认为是生产所谓的tgv(玻璃通孔)最有前途的技术之一。在生产过程中,用超短激光脉冲处理薄玻璃片,诱导表面和体积改性,实现高效的湿法蚀刻和通孔的形成。在优化整个过程和通过激光束并行化扩大生产规模时,精确了解这种玻璃的损伤阈值是必不可少的。在接下来的论文中,我们介绍了波长1030 nm和515 nm的D263玻璃片的LIDT测量的最新结果,有效地利用了这些知识来建立多贝塞尔光束处理光学器件,我们展示了用tgv得到的基板。
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LIDT testing as a tool for optimization of processing window for D263 glass sheet TGV treatment
Laser-Induced Deep Etching (LIDE) is considered as the one of the most promising techniques for production of so-called TGVs (Through Glass Vias). In the production process, thin glass sheet is treated with ultra-short lasers pulses to induce surface and volume modification, allowing efficient wet etching and formation of through hole. Precise knowledge of damage threshold of such glass is essential when optimizing the whole process and scaling up the production via laser beam parallelization. In following paper, we present recent results on LIDT measurement of D263 glass sheets at wavelengths 1030 nm and 515 nm, effective utilization of such knowledge for setting up multi-Bessel beam processing optics, and we demonstrate resulting substrates with TGVs.
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