用动力学全局模型研究高压下泄流的相似规律

Yangyang Fu, Guy M. Parsey, J. Krek, J. Verboncoeur, A. Christlieb, Xinxin Wang
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摘要

本文建立了一个动力学全局模型框架(KGMf),用于研究高压泄放过程的相似规律。在保持pd(气体压力乘以线性尺寸)不变的情况下,计算了几何相似体积从微米尺度$(500 ~\mu \ mathm {m})$增加到毫米尺度$(2.5mm)、压力从760Torr降低到152Torr时的稳态电子和离子密度。该模型考虑了氩原子的电子、正离子和14个激发态,并分别包括和排除了相似律禁止的激发态跃迁、三体碰撞和逐步电离过程[1 - 3]。仿真结果表明,在禁止过程内,归一化密度关系低于相似律的预测关系,这是由于禁止过程的非线性影响。在没有禁止过程的情况下,参数关系与相似定律的理论预测一致。KGMf在高压条件下,如与其他体积和表面过程混合的气体,具有更深入研究相似定律的潜力。
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Investigation of the Similarity Law in Discharges at High Pressure Using A Kinetic Global Model
A kinetic global model framework (KGMf) has been developed and used to investigate the similarity law in discharges at high pressure. Keeping the pd (gas pressure $\times $ linear dimension) unchanged, the electron and ion densities in the steady state are calculated while the geometrical similar volume increases from micron scale $(500 ~\mu \mathrm {m})$ to millimeter scale (2.5mm) and at the pressure decreases from 760Torr to 152Torr, correspondently. In the model, electrons, positive ions and fourteen excited levels of argon atom are considered, and the transition of excitations, three-body collisions, and stepwise ionizations, which are forbidden processes from the similarity law are included and excluded, respectively1–3. The simulation results showed that within the forbidden processes the normalized density relations are below the predicted relations from the similarity law, which is attributed to the nonlinear impact of forbidden processes. Without the forbidden processes, the parameter relations are in good agreement with the theoretical prediction from the similarity law. The KGMf has the potential for deeper studies on similarity law at high pressure, such as gas mixtures with other volume and surface processes.
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