研制基于压电的声学微流控混合器

Pelleti Tharun Kumar Reddy
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摘要

本研究的主要目的是解决微通道中流体的混合问题。目的是利用压电致动器提高微通道的混合效率。该项目的目标是制备ZnO(氧化锌)薄膜,制备具有所需尺寸的微通道,并利用压电致动器检测微通道的混合效率。采用共沉淀法制备ZnO纳米颗粒,用XRD法对其纯度和物相进行检测;采用超声波喷雾热解法制备ZnO薄膜,用涡流法测定薄膜的厚度;用交流电源为压电驱动器供电,测量混合效率。纳米颗粒尺寸为53.88 nm, zno包覆的铜薄膜厚度为102µm,利用主动能量源压电致动器可使混合效率提高93.47%。由于压电致动器的限制,在最大电压保持在5 V时,增加微通道的长度,增加微通道的横截面积,进一步提高了混合效率。
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To Develop Piezoelectric based Acoustic Microfluidic Mixer
The main of this research is to solve the problems of the mixing of fluids in microchannels. The aim is to improve the mixing efficiency of the microchannel by employing the piezoelectric actuator. The objectives of the project are to, producing ZnO (Zinc Oxide) thin films, preparing the microchannel with desired dimensions and examining the mixing efficiency of the microchannel by employing the piezoelectric actuator. The ZnO nanoparticles were produced by the coprecipitation method, and the purity and phase were checked by using the XRD method, the ZnO thin films were produced by the Ultrasonic Spray pyrolysis, the thickness of the thin films was determined by using the Eddy current method, the mixing efficiency was measured by powering the piezoelectric actuator by AC source. The size of the nanoparticles is 53.88 nm, The thickness of the ZnO-coated copper thin films is 102 µm, the mixing efficiency can be increased up to 93.47% with the help of an active source of energy Piezoelectric actuator. The mixing efficiency is further increased by increasing the length of the microchannel, increasing the cross-sectional area of the microchannel, in the maximum voltage kept at 5 V because of the limitation of the piezoelectric actuator.
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