用傅里叶变换模拟MSF误差

M. Pohl, R. Boerret, R. Rascher, Olga Kukso
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引用次数: 7

摘要

研究了精密光学元件制造过程中制造参数与中频误差之间的关系。这第一出版物的重点是磨削步骤的参数。目标是了解和避免中频误差的出现,并开发一种能够预测制造过程中频误差的模拟。
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Simulation of MSF errors using Fourier transform
This research is focused on the link between manufacturing parameters and the resulting mid spatial frequency error in the manufacturing process of precision optics. This first publication focuses on the parameters of the grinding step. The Goal is to understand and avoid the appearance of the mid spatial frequency error and develop a simulation which is able to predict the resulting mid spatial frequency error for/of a manufacturing process.
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