自供电压力传感器柔性压电薄膜的优化模型

2017 IEEE Electrical Design of Advanced Packaging and Systems Symposium (EDAPS) Pub Date : 2017-12-01 DOI:10.1109/EDAPS.2017.8276925

Jiatong Huang, Yiping Zhu, Zerun Yin, Zhijie Zhang, Shaohui Xu, D. Xiong, P. Yang, Lianwei Wang, P. Chu

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引用次数: 3

摘要

模拟并制作了一种由PVDF-TrFE压电薄膜组成的具有高输出电压的柔性锥体压电结构。与扁平、方形柱状和三角线微图薄膜相比，锥体结构具有更强的变应变，产生更高的压电信号。当它们受到相同的机械载荷时，锥体结构产生的输出电压是平面薄膜的9倍。优化后的柔性压电薄膜在自供电压力传感器中具有广泛的应用前景。

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Optimization model for flexible piezoelectric film in self-powered pressure sensor

A flexible pyramidal piezoelectric structure composed of a PVDF-TrFE piezoelectric film which can generate high output voltage is simulated and fabricated. Compared to the flat, square columnar and trigonal-line micropatterned thin films, the pyramidal structure has stronger variation strain and produces higher piezoelectric signals. When they are subjected to the same mechanical load, the pyramidal structure generates output voltage that is 9 times larger than that of the planar film. The optimized flexible piezoelectric film has broad application in self-powered pressure sensors.

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2017 IEEE Electrical Design of Advanced Packaging and Systems Symposium (EDAPS)

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