多晶硅薄膜晶体管的晶界势垒高度和阈值电压模型

Hongyu He, Xueren Zheng
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引用次数: 1

摘要

考虑双指数分布陷阱态,模拟了晶界势垒高度的温度效应。比较了两种阈值电压的定义,即当势垒高度达到最大值时的栅极电压和当俘获和自由电荷界面相等时的栅极电压。并比较了阈值电压对晶粒尺寸的依赖性。基于势垒高度模型计算了低电场迁移率。结果表明,势垒高度对温度的依赖性较小,而对阱态密度和晶粒尺寸的依赖性较大。
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Grain boundary barrier height and threshold voltage model of polycrystalline silicon thin film transistors
Temperature effect of grain boundary barrier height is simulated considering double exponentials distribution trap states. Two threshold voltage definitions are compared, gate voltage when maximum barrier height occurs and when the condition of equal trapped and free charge interface. And grain size dependence of threshold voltage is also present and compared. Low electric field mobility is computed based on the barrier height model. The results show that barrier height is less dependent on temperature, and more dependent on the trap states density or grain size.
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