硅衬底ZnO纳米线阵列的光致发光特性

T. Ishiyama, T. Fujii, Y. Ishii, M. Fukuda
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摘要

采用气-液-固生长技术在硅衬底上合成了单晶氧化锌纳米线阵列。研究了衬底温度和氩气流速等生长条件对ZnO纳米线阵列生长性能的影响。利用扫描电镜(SEM)、x射线衍射(XRD)和光致发光(PL)光谱对材料进行了结构和光学表征。XRD测试结果表明,单晶纳米线沿(002)方向生长。在不同氩气流量下生长的ZnO纳米线阵列的SEM图像表明,气体流量对ZnO纳米线的排列和结构特征有影响。ZnO纳米线阵列的发光在380□nm处有强紫外发射,在510□nm处有弱绿光发射。随着氩气体流量的增加,紫外辐射发生蓝移和展宽。
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Photoluminescence properties of ZnO nanowire arrays fabricated on silicon substrate
Arrays of single-crystal zinc oxide (ZnO) nanowires have been synthesized on silicon substrates by vapor-liquid-solid growth techniques. The effect of growth conditions including substrate temperature and Ar gas flow rate on growth properties of ZnO nanowire arrays were studied. Structural and optical characterization was performed using scanning electron microscopy (SEM), X-ray diffraction (XRD) and photoluminescence (PL) spectroscopy. The XRD measurements showed that the single crystal nanowires exhibited growth in the (002) direction. SEM images of the ZnO nanowire arrays grown at various Ar gas flow rates indicated that the alignment and structural features of ZnO nanowires were affected by the gas flow rate. The PL of the ZnO nanowire arrays exhibited strong ultraviolet (UV) emission at 380□nm and weak green emission around 510□nm. A blue shift and broadening of the UV emission was observed with an increment of Ar gas flow rate.
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