硼硅酸盐冠玻璃光学元件的大气等离子体喷射加工

Precision Optics Manufacturing Pub Date : 2021-06-07 DOI:10.1117/12.2593591

H. Müller, G. Böhm, T. Arnold

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引用次数: 1

摘要

对硼硅冠玻璃进行了大气等离子体喷射加工。含氟等离子体射流适合于该材料的蚀刻。在加工过程中，衬底表面温度约为325°C是控制去除所必需的。图形误差可以通过基于停留时间的确定性过程进行校正。得到的表面粗糙度取决于被加工样品的表面温度。

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Atmospheric plasma jet machining of an optical element made from borosilicate crown glass

Atmospheric Plasma Jet Machining is performed on Borosilicate Crown Glass. A fluorine containing plasma jet is suitable for the etching of the material. A substrate surface temperature of about 325°C during processing is necessary for a controlled removal. The figure error can be corrected by a dwell time based deterministic process. The resulting surface roughness depends on the surface temperature of the processed sample.

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Precision Optics Manufacturing

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