Subwavelength mie-resonant selenium resonators for mid-infrared meta-optics

Efficient light manipulation at subwavelength scales in the mid-infrared (MIR) region is essential for various applications and can be harnessed from intrinsic low-loss dielectric resonators. Here, we demonstrate the fabrication of truncated spherical selenium (Se) resonators with tunable high-quality (Q) factor Mie resonances. Large area amorphous Se subwavelength resonators of varying sizes were grown on different substrates, using a novel CVD process. We demonstrate size-tunable Mie resonances spanning the 2-16 µm range, for single isolated resonators and large area ensembles, respectively. We show strong tunable absorption resonances (90%) in ensembles of resonators in a significantly broad MIR range. Moreover, by coupling resonators to epsilon-near-zero (ENZ) substrates, we engineer high-Q resonances as high as Q=40. These findings open up new possibilities in meta-atom paints, anti-reflective coatings, detection technology, and large area metasurface fabrications.