Design and laser damage properties of a dichroic beam combiner coating for 22.5° incidence and S polarization with high-transmission at 527nm and high-reflection at 1054nm

We have designed a dichroic beam combiner coating consisting of 11 HfO2/SiO2 layer pairs deposited on a large fused silica substrate. The coating provides high transmission (HT) at 527 nm and high reflection (HR) at 1054 nm for light at 22.5° angle of incidence (AOI) in air in S polarization (Spol). The coating's design is based on layers of near half-wave optical thickness in the design space for stable HT at 527 nm, with layer modifications that provide HR at 1054 nm while preserving HT at 527 nm. Its implementation in the 527 nm/1054 nm dual wavelength beam combiner arrangement has two options, with each option requiring one or the other of the high intensity beams to be incident on the dichroic coating from within the substrate (from glass). We show that there are differences between the two options with respect to the laser-induced damage threshold (LIDT) properties of the coating, and analyze the differences in terms of the 527 nm and 1054 nm E-field intensity behaviors for air → coating and glass → coating incidence. Our E-field analysis indicates that LIDTs for air → coating incidence should be higher than for glass → coating incidence. LIDT measurements for Spol at the use AOI with ns pulses at 532 nm and 1064 nm confirm this analysis with the LIDTs for glass → coating incidence being about half those for air → coating incidence at both wavelengths. These LIDT results and the E-field analysis clearly indicate that the best beam combiner option is the one for which the high intensity 527 nm beam is incident on the coating from air and the 1054 nm high intensity beam is incident on the coating from glass.