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引用次数: 7

摘要

ESD是集成电路芯片质量的主要关注点,无论是从可靠性要求还是从长期现场操作要求来看都是如此。无论是人为操作还是机器接触造成的损伤现象,都可能出现热损伤和氧化破裂。本文介绍了由静电放电引起的集成电路损伤现象、对集成电路功能的影响、采用片内保护设计来克服这些问题的方法,以及在先进的工艺和封装技术下这些保护方法所面临的挑战。对目前用于改进保护设计的仿真和建模方法进行了综述。
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ESD: design for IC chip quality and reliability
ESD is a major concern for IC chip quality both from building-in-reliability requirement and from long-term field operation requirement. The damage phenomena, either from human handling or machine contact, could appear as thermal damage and oxide rupture. In this paper, the IC damage phenomena due to ESD, the effects on the IC functionality, the proper methods to overcome these with on-chip protection designs, and the challenges facing these protection methods with the advanced process and package technologies are presented. Simulation and modeling methods that are currently used to improve the protection designs are also reviewed.
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