{"title":"亚半微米球形粒子在硅和氧化物/硅表面的光散射*","authors":"E. Bawolek, E. Hirleman","doi":"10.1364/surs.1992.pd3","DOIUrl":null,"url":null,"abstract":"We report angle resolved light scattering characteristics of individual polystyrene spheres on silicon and on a 91.5 nm thick film of oxide on silicon. Scattering was measured as a function of polarization using a He-Ne laser at a 45 degree incident angle.","PeriodicalId":339350,"journal":{"name":"Surface Roughness and Scattering","volume":"15 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Light Scattering by Sub-Half Micron Spherical Particles on Silicon and Oxide/Silicon Surfaces*\",\"authors\":\"E. Bawolek, E. Hirleman\",\"doi\":\"10.1364/surs.1992.pd3\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We report angle resolved light scattering characteristics of individual polystyrene spheres on silicon and on a 91.5 nm thick film of oxide on silicon. Scattering was measured as a function of polarization using a He-Ne laser at a 45 degree incident angle.\",\"PeriodicalId\":339350,\"journal\":{\"name\":\"Surface Roughness and Scattering\",\"volume\":\"15 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Surface Roughness and Scattering\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/surs.1992.pd3\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Surface Roughness and Scattering","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/surs.1992.pd3","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Light Scattering by Sub-Half Micron Spherical Particles on Silicon and Oxide/Silicon Surfaces*
We report angle resolved light scattering characteristics of individual polystyrene spheres on silicon and on a 91.5 nm thick film of oxide on silicon. Scattering was measured as a function of polarization using a He-Ne laser at a 45 degree incident angle.
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