GaAs半绝缘栅场效应管(sigfet)作为大功率MMIC控制器件

Y. Yun, R. Gutmann
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引用次数: 3

摘要

介绍了GaAs sigfet器件的结构、制作方法、初始实验性能以及与传统的嵌入式栅极GaAs MESFET器件相比的优点。制备的GaAs平面sigfet具有比同类GaAs凹栅mesfet更高的连续波功率处理能力和相似的开关频率性能。初始SIGFET器件的功率处理能力提高了3 dB到5 dB,开关频率的优值为362 GHz。这种改进的功率性能主要是由于栅极金属下面的半绝缘层,它允许更高的栅极击穿电压以及更高的漏极饱和电流。
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GaAs semi-insulated-gate FETs (SIGFETs) as high power MMIC control devices
The GaAs SIGFETs device structure, fabrication, initial experimental performance and advantages compared to conventional recessed-gate GaAs MESFET devices are described. GaAs planar SIGFETs have been fabricated with higher continuous-wave power handling capability than and similar switching frequency figure-of-merit to those of comparable GaAs recessed-gate MESFETs. Initial SIGFET devices demonstrated 3 dB to 5 dB increase in power-handling capability with a switching frequency figure-of-merit of 362 GHz. This improved power performance is due chiefly to the semi-insulated layer under the gate metal, which allows higher gate-breakdown voltage as well as higher drain saturation current.<>
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