H. Unold, M. Kicherer, Safwat W. Z. Mahmoud, R. Jager, R. Michalzik, K. Ebeling
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Spatially varied anti-resonant DBR design for large-area single-mode VCSELs
The fabricated VCSELs with anti-resonant top DBRs exhibit complete single-mode operation up to 3 mW output power even for large oxide aperture diameters up to 11 μm. The far-field can be described well by the Airy function and the corresponding FWHM angle remains below 5.5° with a variation of only 20% from threshold to roll-over. The combination of completely single-mode operation, low series resistance and a very stable low far-field angle make this type of device the emitter of choice for high-speed data transmission.
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