磁磨料抛光:机遇与前景

M. Khomich, Viachaslau Bitkasha, Kseniya Yurasava
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引用次数: 0

摘要

本文介绍了机械和仪器高精度表面磁磨料抛光(MAP)的概况。抛光过程由铁磨料粉末工具完成,由磁场形成“弹性刷”。磁场有助于形成具有最小结构缺陷的表面层。MAP技术用于光学、激光和电子的超精细抛光操作。介绍了A17型程控安装的主要特点,适用于尺寸达200毫米的MAP表面。所提出的有效技术可以形成粗糙度参数Ra小于5埃的表面纳米浮雕。它可以显著提高光学和激光系统的有源元件的激光诱导损伤阈值。
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Magnetic-abrasive polishing: opportunities and prospects
This paper provides general information about Magnetic-Abrasive Polishing (MAP) of high-precision surfaces of machines and instruments. The polishing process is performed by a ferroabrasive powder tool, formed by the magnetic field into an “elastic brush”. The magnetic field helps formation of the surface layer with a minimum of structure defects. MAP technologies are used for finishing operations of super-fine polishing of optics, lasers and electronics. The main characteristics of the program-controlled installation of the model A17 for MAP surfaces up to 200 mm in size are presented. The presented effective technology allows forming a surface nanorelief with a roughness parameter Ra of less than 5 angstroms. It allows to significantly increase the laser induced damage threshold of the active elements of optical and laser systems.
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